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20 October 2009 Experiment and simulation on responses of polymer induced by laser irradiation
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Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 749325 (2009) https://doi.org/10.1117/12.841221
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China
Abstract
With the development of microelectromechanical system (MEMS) technology, the limitations of machining technology for silicon-based materials become more and more distinct. With its abilities on sub-micron structure machining, the pulsed laser micro-fabrication technology has an extensive application prospect in MEMS and many other materials. The thermal interaction process of polymer under laser irradiation is very complex, regularities on polymer target under laser irradiation between displacement and laser energy density can only be obtained through experiments. Based on finite element method (FEM), simulations have been performed and compared with experiment results. Relations among pulsed laser intensity, actuation duration and thermal shock loads were obtained from the comparison, and a formula for calculating the maximum ablation pressure of a carbon fiber epoxy resin polymer composites was proposed. This study provides theoretical basis to the pulsed laser micro-fabrication technology's application in the fields of MEMS.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Haiming Huang and Xiaoliang Xu "Experiment and simulation on responses of polymer induced by laser irradiation", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 749325 (20 October 2009); https://doi.org/10.1117/12.841221
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