Bio-molecules detection sensor using silicon nanowire

Pan K. Kim; Seong J. Cho; Jungwoo Sung; Hyun S. Oh; Geunbae Lim

doi:10.1117/12.840353

20 October 2009 Bio-molecules detection sensor using silicon nanowire

Pan K. Kim, Seong J. Cho, Jungwoo Sung, Hyun S. Oh, Geunbae Lim

Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 74935D (2009) https://doi.org/10.1117/12.840353
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China

Abstract

To detect a signal change in nano scale, Schottky barrier - silicon nanowire field effect transistor (SB-SiNWFET) for detecting a bio-molecule was fabricated by combining E-beam lithography and conventional MEMS technique. Detection of few bio-molecules is enabled by realizing the gold nanodots on silicon nanowire (SiNW). By performing pH test and carbohydrate binding measurement, we conclude that our sensor can detect very small quantity of biomolecules.

Citation Download Citation

Pan K. Kim, Seong J. Cho, Jungwoo Sung, Hyun S. Oh, and Geunbae Lim "Bio-molecules detection sensor using silicon nanowire", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935D (20 October 2009); https://doi.org/10.1117/12.840353

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