Design and fabrication of a microfluidic chip driven by dielectric elastomers

Bo Li; Hualing Chen; Jiuhui Wu; Zicai Zhu; Dongmei Xia; Sufang Jing

doi:10.1117/12.838431

20 October 2009 Design and fabrication of a microfluidic chip driven by dielectric elastomers

Bo Li, Hualing Chen, Jiuhui Wu, Zicai Zhu, Dongmei Xia, Sufang Jing

Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 74935S (2009) https://doi.org/10.1117/12.838431
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China

Abstract

This paper presents a valveless microfluidic chip driven by dielectric elastomers (DEs). First, the planar DE actuator is designed and the diaphragm actuating performances were characterized. Then the micro chip, containing a pump chamber and a pair of nozzle/diffuser, is fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 is sealed and finally covered by a PMMA. The pumping and flow rate is tested and measured under high AC supply, and a maxim flow rate of 21.2μl is achieved under 3500V, 8Hz sine wave.

Citation Download Citation

Bo Li, Hualing Chen, Jiuhui Wu, Zicai Zhu, Dongmei Xia, and Sufang Jing "Design and fabrication of a microfluidic chip driven by dielectric elastomers", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935S (20 October 2009); https://doi.org/10.1117/12.838431

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