Frequency shift of piezoelectric microcantilever humidity sensors

Fei Wang

doi:10.1117/12.840104

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20 October 2009 Frequency shift of piezoelectric microcantilever humidity sensors

Fei Wang

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Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 74936P (2009) https://doi.org/10.1117/12.840104
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China

Abstract

Recent researches on dynamic behavior of micro cantilevers indicate that the flexural resonance frequencies of piezoelectric microcantilever sensors (PEMS) could be influenced by air in which it immersed as a result of viscous damping effect, which reduces the accuracy of the PEMS. A detailed theoretical analysis of the frequency response of a PEM immersed in air and excited by an arbitrary driving force is presented in this paper, in which the couple stress theory (Cosserat theory) is introduced to the dynamic deflection function of a PEM to explain the size effect. Numerical results have shown a good agreement with the experiments. Methods for prediction of dynamic characteristics of long beam-like micro components could be easily derived based on the presented theory, which is of value to users and designers of micro-electro-mechanical systems (MEMS).

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Fei Wang "Frequency shift of piezoelectric microcantilever humidity sensors", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74936P (20 October 2009); https://doi.org/10.1117/12.840104

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