Thermal robustness of ion beam sputtered TiO2/SiO2, TiO2/Al2O3, and Al2O3/SiO2 IR anti-reflective coatings on YAG and sapphire substrates

Dale C. Ness; Nick Traggis; Ove Lyngnes

doi:10.1117/12.836490

31 December 2009 Thermal robustness of ion beam sputtered TiO₂/SiO₂, TiO₂/Al₂O₃ and Al₂O₃/SiO₂ IR anti-reflective coatings on YAG and sapphire substrates

Dale C. Ness, Nick Traggis, Ove Lyngnes

Author Affiliations +

Proceedings Volume 7504, Laser-Induced Damage in Optical Materials: 2009; 750406 (2009) https://doi.org/10.1117/12.836490
Event: Laser Damage Symposium XLI: Annual Symposium on Optical Materials for High Power Lasers, 2009, Boulder, Colorado, United States

Abstract

As optical coatings are deployed in more extreme environments and applications, mechanical and environmental robustness must be taken into account when designing the film(s). Even minor degradation of the film structure from these outside factors can affect final fluence handling capabilities in operation, and limit the life of the coating. We present the results of a study of maximum thermal handling capabilities of Broad-Band IR Anti-Reflective coatings in the mid-IR (3 to 5 micron) regime. We prepared a family of coated optics utilizing different coating material sets on different substrate materials, and exposed them to a range of increasing temperatures. We examined the damage morphologies under dark field, bright field, and Nomarski microscopy.

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Dale C. Ness, Nick Traggis, and Ove Lyngnes "Thermal robustness of ion beam sputtered TiO₂/SiO₂, TiO₂/Al₂O₃ and Al₂O₃/SiO₂ IR anti-reflective coatings on YAG and sapphire substrates", Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 750406 (31 December 2009); https://doi.org/10.1117/12.836490

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