Angle resolved scattering: a method for in situ investigations of laser-induced damage?

Sven Schröder; Tobias Herffurth; Angela Duparré

doi:10.1117/12.850389

31 December 2009 Angle resolved scattering: a method for in situ investigations of laser-induced damage?

Sven Schröder, Tobias Herffurth, Angela Duparré

Proceedings Volume 7504, Laser-Induced Damage in Optical Materials: 2009; 75041H (2009) https://doi.org/10.1117/12.850389
Event: Laser Damage Symposium XLI: Annual Symposium on Optical Materials for High Power Lasers, 2009, Boulder, Colorado, United States

Abstract

Light scattering from interface imperfections or defects is a topic of persistent interest. On the one hand, light scattering can be a critical issue that limits throughput and imaging quality of optical components even if high-end polishing and coating techniques are employed. This in particular holds for multilayer coatings and for short wavelengths of application. On the other hand, scattered light also carries valuable information about its origins, such as the structural properties of multilayer coatings. A large variety of instruments for scatter measurements in the visible, ultraviolet, infrared spectral ranges has been developed at the Fraunhofer IOF in Jena during the past years. In addition, software tools have been developed based on existing scattering theories which enable an advanced analysis of the observed scattering properties. For the rather complicated scattering of thin film coatings, a simplified model was developed recently which introduces two simple parameters to describe the roughness evolution from interface to interface and optical thickness deviations. An iterative solution of the inverse scattering problem yields information about alterations of the structural and optical properties inside multilayer coatings based on angle resolved scatter measurements. Experimental results will be presented for highly reflective metal fluoride coatings for 193 nm as well as for a Rugate filter after laser damage tests. It will be discussed how the procedure could be implemented in a laser damage test environment to enable the damage behavior to be characterized in-situ during irradiation. This can provide valuable information about the fundamental damage processes even prior to the ultimate damage events.

Citation Download Citation

Sven Schröder, Tobias Herffurth, and Angela Duparré "Angle resolved scattering: a method for in situ investigations of laser-induced damage?", Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 75041H (31 December 2009); https://doi.org/10.1117/12.850389

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available