One-shot surface profile measurement using polarized phase-shifting

Yuan-Fang Chen; Yi-liang Du

doi:10.1117/12.836308

20 November 2009 One-shot surface profile measurement using polarized phase-shifting

Yuan-Fang Chen, Yi-liang Du

Proceedings Volume 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 751102 (2009) https://doi.org/10.1117/12.836308
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

An instantaneous polarized phase-shifting interferometer (IPSI) with an optical image combiner is designed to form a one-shot surface profile measurement system. The interference images are captured simultaneously by using one CCD camera. Digital image correlation (DIC) method is applied effectively to correct the position mismatch among the images. Test of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.07μm~0.09μm can be achieved, and the maximum error is about 0.2μm.

Citation Download Citation

Yuan-Fang Chen and Yi-liang Du "One-shot surface profile measurement using polarized phase-shifting", Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 751102 (20 November 2009); https://doi.org/10.1117/12.836308

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available