Ellipsometric data inversion of absorbing films by simulated annealing - simplex hybrid algorithm

Zuohuah Huang; Lijuan Wang; Zhenjiang He

doi:10.1117/12.837845

20 November 2009 Ellipsometric data inversion of absorbing films by simulated annealing - simplex hybrid algorithm

Zuohuah Huang, Lijuan Wang, Zhenjiang He

Proceedings Volume 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 75111E (2009) https://doi.org/10.1117/12.837845
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

A simulated annealing-simplex downhill hybrid algorithm is presented to solve the problems of ellipsometric data inversion. Basing on Monte Carlo technique of simulated annealing algorithm, the hybrid algorithm uses simplex downhill algorithm to get the local optimization and avoids the local optimization to get the global optimization by Metropolis accepting principle, then the global optimum ellipsometric data are obtained quickly. A typical model with single-layer absorbing film was dealt with by the hybrid algorithm and the simulated annealing algorithm respectively in numerical simulation experiments. The results show that the hybrid algorithm is feasible, credible and ascendant in ellipsometric data inversion. Furthermore, with the same testing conditions and inversion precision, the hybrid algorithm can save time with two quantity degrees, so it will be found more applications in practice.

Citation Download Citation

Zuohuah Huang, Lijuan Wang, and Zhenjiang He "Ellipsometric data inversion of absorbing films by simulated annealing - simplex hybrid algorithm", Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 75111E (20 November 2009); https://doi.org/10.1117/12.837845

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