Measurement mark profiles of digital versatile disc and multilevel read-only disc with atomic force microscopy

Hailong Liu; Jing Pei; Yi Ni; Longfa Pan

doi:10.1117/12.843368

23 October 2009 Measurement mark profiles of digital versatile disc and multilevel read-only disc with atomic force microscopy

Hailong Liu, Jing Pei, Yi Ni, Longfa Pan

Author Affiliations +

Proceedings Volume 7517, Photonics and Optoelectronics Meetings (POEM) 2009: Optical Storage and New Storage Technologies; 75170D (2009) https://doi.org/10.1117/12.843368
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

This paper presents the profile measurement method for recording marks in signal waveform modulation multilevel (SWM) read-only disc. In SWM disc, multilevel is realized with the combined varying size and position of inserted subpit/ sub-land in an original recording land/pit. The micro-patterns of the recording marks are key identifier for level of run-lengths. In mastering process, the mark profile is shaped with timing duration variation of the power of laser beam recorder (LBR). To form ideal SWM recording pit microstructure, atomic force microscope (AFM) is used to measure the pit profile, which is feedback and used to adjust the writing strategy. The measured parameters including depth, height and position, etc. 6T land and pit are selected as examples to describe the relationship between the variation of these parameters and levels of run-lengths. The recording symbol microstructures of DVD and signal amplitude modulation (SAM) multilevel optical disc are also measured with AFM, which are compared with the mark profile of SWM disc. The experimental results show that the AFM measurement for SWM recording marks is an effective method. These quantitative measurement results provide theoretical basis for SWM stamper disc manufacturing process.

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Hailong Liu, Jing Pei, Yi Ni, and Longfa Pan "Measurement mark profiles of digital versatile disc and multilevel read-only disc with atomic force microscopy", Proc. SPIE 7517, Photonics and Optoelectronics Meetings (POEM) 2009: Optical Storage and New Storage Technologies, 75170D (23 October 2009); https://doi.org/10.1117/12.843368

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KEYWORDS

Atomic force microscopy

Digital video discs

Modulation

Compact discs

Optical discs

Optical recording

Manufacturing

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