ICP etching of high Al mole fraction AlGaN

Zhao Meng; Libo Yu; Xiao Li; Qibin Liu; Huiqiang Duan; Chenhui Yu; Changqing Chen

doi:10.1117/12.841195

12 October 2009 ICP etching of high Al mole fraction AlGaN

Zhao Meng, Libo Yu, Xiao Li, Qibin Liu, Huiqiang Duan, Chenhui Yu, Changqing Chen

Proceedings Volume 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies; 75180H (2009) https://doi.org/10.1117/12.841195
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

The etching process has great influence on the performance of solar blind detector based on Al_xGa_1-xN epitaxial layers on sapphire substrate with high Al mole fraction grown by metal organic chemical vapor deposition (MOCVD) method. Traditional etching methods, including wet or reactive ion etching (RIE) are hard to achieve good result due to the high chemical-stability of AlGaN films with high Al mole fraction. In this paper, we studied on the inductively coupled plasma reactive ion etching (ICP-RIE) of high Al mole fraction Al_xGa_1-xN films (x>0.4) for fabricating high performance solar blind detectors. SiN was used as mask, and Cl2 and BCl3 were used as etching gas. Etching systems was selected from Oxford Inc. DC bias was controlled automatically. A 2.5:1 of selectivity on AlGaN and SiN was obtained with suitable flux and component of etching gas, RF power and ICP power. Etching velocity was adjusted mainly by RF power. The role of Ar, Cl₂, and BCl₃ in the etching process was also discussed.

Citation Download Citation

Zhao Meng, Libo Yu, Xiao Li, Qibin Liu, Huiqiang Duan, Chenhui Yu, and Changqing Chen "ICP etching of high Al mole fraction AlGaN", Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 75180H (12 October 2009); https://doi.org/10.1117/12.841195

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available