Durability of self-standing resist sheet composed with micro holes

Akihiro Takano; Akira Kawai

doi:10.1117/12.841091

14 December 2009 Durability of self-standing resist sheet composed with micro holes

Akihiro Takano, Akira Kawai

Proceedings Volume 7520, Lithography Asia 2009; 752032 (2009) https://doi.org/10.1117/12.841091
Event: SPIE Lithography Asia, 2009, Taipei, Taiwan

Abstract

MEMS (Micro Electro Mechanical systems) technology has been widely employed for micro device fabrication. Polymer materials, such as photoresist resin, have been focused as permanent structural materials used for MEMS. It is required that the permanent structural materials are durable to employ to micro device component. We demonstrate that the mechanical strength of self-standing resist film is enhanced by forming hexagonal hole array. The destruction strength of the resist film is analyzed by peel destruction test. As a result, the enhancement of the self-standing resist film with patterning can be obtained.

Citation Download Citation

Akihiro Takano and Akira Kawai "Durability of self-standing resist sheet composed with micro holes", Proc. SPIE 7520, Lithography Asia 2009, 752032 (14 December 2009); https://doi.org/10.1117/12.841091

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