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26 February 2010 Plasma parameters and active particles kinetics in HBr dc glow discharges
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Proceedings Volume 7521, International Conference on Micro- and Nano-Electronics 2009; 752108 (2010) https://doi.org/10.1117/12.853343
Event: International Conference on Micro- and Nano-Electronics 2009, 2009, Zvenigorod, Russian Federation
Abstract
The study of the direct current (dc) glow discharge plasma parameters and active species kinetics in HBr (p=30-250 Pa, id=10-30 mA) was carried out using the 0-dimensional self-consistent steady-state model. The model included the Boltzmann kinetic equation, the balance equations for both neutral and charge particles, plasma conductivity equation and the quasi-neutrality conditions for volume densities of charged particles as well as for their fluxes to the reactor walls. The final set of cross-sections of electron impact processes for HBr molecules was optimized based on the recent literature data. The data on the steady-state electron energy distribution function, electron gas characteristics (mean energy, drift rate and transport coefficients) and volume-averaged densities of plasma active species were obtained as functions of gas pressure and discharge current.
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A. Smirnov, A. Efremov, V. Svettsov, and A. Islyaykin "Plasma parameters and active particles kinetics in HBr dc glow discharges", Proc. SPIE 7521, International Conference on Micro- and Nano-Electronics 2009, 752108 (26 February 2010); https://doi.org/10.1117/12.853343
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