Clamping properties investigation in micro/nano scale experimental mechanics

Xide Li; Liang Liu; Dujuan Zeng; Dongchun Su

doi:10.1117/12.849173

Translator Disclaimer

14 April 2010 Clamping properties investigation in micro/nano scale experimental mechanics

Xide Li, Liang Liu, Dujuan Zeng, Dongchun Su

Author Affiliations +

Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 75221K (2010) https://doi.org/10.1117/12.849173
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore

Abstract

Creation of strong clamping or gripping becomes a crucial issue in micro and nano scale mechanical experiments. In this paper, several kinds of clamping in micro/nano scale experiments are investigated and compared. Topics include the clamping based on the electron-beam-induced deposition (EBID), the van der Waals interaction, the capillary force, and the electrostatic attractive interaction. The clamping strength and mechanism are analyzed both theoretically and experimentally. The influence of the relative humidity on the micro/nano scale clamping is discussed. The clamping strengths and performances of different clamping methods are also compared considering the size and the material of the clamped objects, and the application environments.

Citation Download Citation

Xide Li, Liang Liu, Dujuan Zeng, and Dongchun Su "Clamping properties investigation in micro/nano scale experimental mechanics", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75221K (14 April 2010); https://doi.org/10.1117/12.849173

ACCESS THE FULL ARTICLE