Motion error analysis of profilometer with grating-inductance combination

Xuanze Wang; Ying Wu; Liangen Yang

doi:10.1117/12.885400

28 December 2010 Motion error analysis of profilometer with grating-inductance combination

Xuanze Wang, Ying Wu, Liangen Yang

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75440X (2010) https://doi.org/10.1117/12.885400
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

Common profilometers cannot be used to measure the complex surfaces with large range. A cantilever profilometer with large range and high accuracy is presented in this paper. The profilometer is composed of inductive sensors, gratings and angle measurement structure, which are used to measure surface profile, movement displacement and angle of the cantilever beam separately. The angle measured by the invariant light-distance structure based on auto-collimation principle is used to compensate the Abbe error to ensure high measurement accuracy. For counting accurately, a method of resistance chain subdivision is designed to process the grating interference fringe signal. Experiment results show that the Abbe error can be compensate through the invariant light-distance structure based on auto-collimation principle. The designed profilometer can be used to measure complex morphology.

Citation Download Citation

Xuanze Wang, Ying Wu, and Liangen Yang "Motion error analysis of profilometer with grating-inductance combination", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75440X (28 December 2010); https://doi.org/10.1117/12.885400

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