Precise stage design with planar diffraction grating interferometer

Haojie Xia; Yetai Fei

doi:10.1117/12.885215

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28 December 2010 Precise stage design with planar diffraction grating interferometer

Haojie Xia, Yetai Fei

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Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 754411 (2010) https://doi.org/10.1117/12.885215
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

Planar cross diffraction grating can be adopted to measure displacement as scale. In this paper, Planar grating interferometer configuration for precise displacement measurements is introduced, and the principle of interferometer based on polarization optics is deduced. According to 2-D grating interferometer structure, error sources are analyzed, and the pitch and yaw of 2-D grating guide caused by planar guide's non-linearity is the main factors to decrease the measurement system's accuracy. With grating interferometer error sources analysis, precise planar stage is proposed to integrate with the gating interferometer, the stage is compact and can minimize abbe error in structure. The methods of calibration and error compensation are employed to improve the position accuracy of the stage. As experiments show, the stage position repeatability is less than 0.1um.

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Haojie Xia and Yetai Fei "Precise stage design with planar diffraction grating interferometer", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754411 (28 December 2010); https://doi.org/10.1117/12.885215

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