Design and analysis of two dimensional X-Y micropositioning stage

Wen Wang; Zhu Zhu; Zichen Chen

doi:10.1117/12.885293

28 December 2010 Design and analysis of two dimensional X-Y micropositioning stage

Wen Wang, Zhu Zhu, Zichen Chen

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75441I (2010) https://doi.org/10.1117/12.885293
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

This paper presents a novel piezodriven X-Y stage utilizing flexure hinges. Levers of high amplifying rate were adopted to magnify the output displacement of the piezoelectric actuator and a complex parallel four-bar mechanism was used to guide the mobile platform. In order to describe the static and dynamic behaviour of the stage, an analytical model was built and a series of formulae were deduced. Based on mathematical analysis, the configuration of the stage was optimized. Then Finite Element Analysis was applied to analyze travel ranges, natural frequencies and stress distribution. The simulation computation results demonstrate that the stage could reach a motion range of 200mby 200m and has a first order natural frequency of 265 Hertz, which is of good concordance with the theoretical estimate. Now a prototype is being fabricated.

Citation Download Citation

Wen Wang, Zhu Zhu, and Zichen Chen "Design and analysis of two dimensional X-Y micropositioning stage", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75441I (28 December 2010); https://doi.org/10.1117/12.885293

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