Paper
31 December 2010 Measurement in precision engineering
Author Affiliations +
Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 754453 (2010) https://doi.org/10.1117/12.885231
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
Modern manufacturing in the globally networked economy with exchange of components, sub-assemblies and final products is based on internationally accepted procedures and standards for production control which in turn require a system which guarantees globally comparable measurements, traceable to the international system of units, the SI. This paper describes some of the activities of the precision engineering division of the PTB, the national metrology institute (NMI) of Germany, to support and further develop the necessary metrology infrastructure for production control. In general, these activities are concentrated on the following aspects: research and development in the field of prototype measurement instrumentation especially adapted to the needs of a metrology institute, modelling of the signal contrast of measurement tools, design and development of suitable calibration standards, determination of calibration uncertainties, e.g. by use of so-called virtual instrumentation models, dissemination of the unit of length to the manufacturing industry as well as science and society by means of calibrated dimensional standards, organization of and involvement in international comparison measurements between NMIs and cooperation in national and international standardization work. Examples for these different activities will be given in this paper with a focus on the support of nanomanufacturing processes.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Bosse "Measurement in precision engineering", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754453 (31 December 2010); https://doi.org/10.1117/12.885231
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KEYWORDS
Metrology

Manufacturing

Standards development

Calibration

Scanning probe microscopy

Photomasks

Control systems

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