A new design of high precision differential plane mirror interferometer

Wenmei Hou

doi:10.1117/12.885292

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28 December 2010 A new design of high precision differential plane mirror interferometer

Wenmei Hou

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Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75446V (2010) https://doi.org/10.1117/12.885292
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

A new design is made for Differential Plane Mirror Interferometer, which has simpler construction, but broader applications for nano-measurement. Due to its symmetrical optical configurations, the high measurement accuracy of geometrical parameters can be achieved with sub-nanometer. With this special arrangement and the use of some additional optical components, several specification measurements have become easily to implement and have higher exactness, such as for linear displacement, small rotation, straightness, perpendicularity, parallelism and etc. In addition, because of its simpler optical configuration with few optical components, it is easier for manufacturing and thus decreases the cost. This will make it possible to create new measurement instruments and broaden the market for laser interferometer. The stability and resolution of both Michelson interferometer and our new type of Differential Plane Mirror Interferometer were tested. The experiment results proved its outstanding capabilities.

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Wenmei Hou "A new design of high precision differential plane mirror interferometer", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75446V (28 December 2010); https://doi.org/10.1117/12.885292

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