Excimer laser deposition of super-hard coatings

Ralph Delmdahl; Steffen Weissmantel; Guenter Reisse

doi:10.1117/12.838350

17 February 2010 Excimer laser deposition of super-hard coatings

Ralph Delmdahl, Steffen Weissmantel, Guenter Reisse

Proceedings Volume 7581, High Energy/Average Power Lasers and Intense Beam Applications IV; 75810C (2010) https://doi.org/10.1117/12.838350
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

Super-hard functional coatings are obtained by high power excimer laser based PLD. Diamond-like, tetrahedral amorphous carbon (ta-C) is grown on substrates moderately heated to below 90°C inside a vacuum chamber upon ablating a graphite target by means of a high pulse energy excimer laser at a wavelength of 248 nm. The fast evaporation of the target material induced by the high photon energy of 5 eV, the short temporal width of 30 ns and the high fluence of the excimer laser pulses generates plume species with a high degree of ionisation and high kinetic energies. As a consequence, the kinetic energies resulting from excimer based PLD are significantly higher than those associated with the thermal evaporation and the ion sputtering deposition methods. In fact, the mean kinetic energy of the atoms and ions in the plume are in the range of 30 eV to 80 eV for fluencies of 5 J/cm² to 20 J/cm². Such large ontarget UV fluences are easily provided by high energy excimer lasers such as the Coherent LPXpro and by LSX laser models which can operate at output energies up to 1 J and average output powers up to 540 W.

Citation Download Citation

Ralph Delmdahl, Steffen Weissmantel, and Guenter Reisse "Excimer laser deposition of super-hard coatings", Proc. SPIE 7581, High Energy/Average Power Lasers and Intense Beam Applications IV, 75810C (17 February 2010); https://doi.org/10.1117/12.838350

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