Effect of target structure on interfering femtosecond laser processing

Y. Nakata; T. Hiromoto; N. Miyanaga

doi:10.1117/12.845963

17 February 2010 Effect of target structure on interfering femtosecond laser processing

Y. Nakata, T. Hiromoto, N. Miyanaga

Proceedings Volume 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV; 75840H (2010) https://doi.org/10.1117/12.845963
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

Top down technology of ultra-short pulse laser processing was applied to induce liquidly process and generate new nanostructures such as nanobump, bead-on-bump and burst structure. Bilayer thin film was used as a sample, and structure changed by the film formation. For example, Burst structure could be generated in the case of Au on Ag film structure. In the case of Ag on Au structure, only nanobump and bead-on-bump structure could be generated, and which is similar to single layer case.

Citation Download Citation

Y. Nakata, T. Hiromoto, and N. Miyanaga "Effect of target structure on interfering femtosecond laser processing", Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840H (17 February 2010); https://doi.org/10.1117/12.845963

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