MOPA fiber laser with controlled pulse width and peak power for optimizing micromachining applications

Sami T. Hendow; Sami A. Shakir; Joao M. Sousa

doi:10.1117/12.846928

17 February 2010 MOPA fiber laser with controlled pulse width and peak power for optimizing micromachining applications

Sami T. Hendow, Sami A. Shakir, Joao M. Sousa

Proceedings Volume 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV; 758417 (2010) https://doi.org/10.1117/12.846928
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

An optimized 1064nm MOPA fiber laser configuration is used for generating pulse widths from 10 ns to 250 ns, with pulse repetition frequencies that range from single-shot to 500 kHz, and peak powers up to 10kW. These parameters are independently controlled and used to investigate the effect of peak power and pulse energy on material ablation. Test results are demonstrated for processed silicon and ceramic materials using pulse energies up to 0.5 mJ and peak powers up to 10kW. We demonstrate that pulses with high peak powers have shallow penetration depths, as compared to longer pulses. These experimental results are well correlated with those from a theoretical thermal model for silicon ablation that is based on silicon temperature rise as the incident pulse energy is absorbed.

Citation Download Citation

Sami T. Hendow, Sami A. Shakir, and Joao M. Sousa "MOPA fiber laser with controlled pulse width and peak power for optimizing micromachining applications", Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 758417 (17 February 2010); https://doi.org/10.1117/12.846928

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