Fabrication of dielectric and metallo-dielectric 3D nanostructures by direct laser writing and electroless plating

André Radke; Frank Wolff; Harald Giessen; Thomas Klotzbücher

doi:10.1117/12.845474

23 February 2010 Fabrication of dielectric and metallo-dielectric 3D nanostructures by direct laser writing and electroless plating

André Radke, Frank Wolff, Harald Giessen, Thomas Klotzbücher

Author Affiliations +

Proceedings Volume 7585, Laser-based Micro- and Nanopackaging and Assembly IV; 75850M (2010) https://doi.org/10.1117/12.845474
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

Direct laser writing via two-photon absorption allows the fabrication of three-dimensional dielectric structures with submicron resolution by tightly focusing ultrashort laser pulses into a photo-sensitive material with a high-resolution microscope objective and scanning the laser focus relative to the material. Woodpile photonic crystals fabricated with this method show a characteristic dip in transmission at near-infrared wavelengths. The spectral position of this transmission dip scales with the grating period of the fabricated crystals. Metallo-dielectric structures can be obtained by first fabricating dielectric templates with direct laser writing and subsequently coating the templates with a thin conformal metal film by electroless plating. Contiguous and conducting silver films can be deposited even on convoluted 3D geometries.

Citation Download Citation

André Radke, Frank Wolff, Harald Giessen, and Thomas Klotzbücher "Fabrication of dielectric and metallo-dielectric 3D nanostructures by direct laser writing and electroless plating", Proc. SPIE 7585, Laser-based Micro- and Nanopackaging and Assembly IV, 75850M (23 February 2010); https://doi.org/10.1117/12.845474

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