Fabrication of plastic microlens arrays for array microscopy by diamond milling techniques

Brian McCall; Gabriel Birch; Michael Descour; Tomasz Tkaczyk

doi:10.1117/12.840794

16 February 2010 Fabrication of plastic microlens arrays for array microscopy by diamond milling techniques

Brian McCall, Gabriel Birch, Michael Descour, Tomasz Tkaczyk

Proceedings Volume 7590, Micromachining and Microfabrication Process Technology XV; 75900A (2010) https://doi.org/10.1117/12.840794
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Six microlens arrays are fabricated in a single step process using diamond milling techniques, plunging and micromilling. Four of the lenses are cut using plunging, two each in poly(methyl methacrylate) and polystyrene (Rexolite 1422), and the other two are cut in polystyrene using 3D micro-milling. Half of the lenses are concave and the other half are convex. These are high power lenses having steep sag at the edges and radii between 2.0 - 2.1 mm for each array. The clear aperture diameters of the lenses are about 3.2 mm for plunged lenses and 2.6 mm for micro-milled lenses. The lenses are spaced 4 mm apart in a square grid. Setup and method of these techniques is described and the lens arrays are characterized based on radius (power) error, wavefront error, roughness, and grid position error. Micro-milled lenses are shown to be of high optical quality compared with standards for injection molded plastic lenses.

Citation Download Citation

Brian McCall, Gabriel Birch, Michael Descour, and Tomasz Tkaczyk "Fabrication of plastic microlens arrays for array microscopy by diamond milling techniques", Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 75900A (16 February 2010); https://doi.org/10.1117/12.840794

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