Nanoengineered surfaces for microfluidic-based thermal management devices

Evelyn N. Wang; Rong Xiao; Kuang-Han Chu

doi:10.1117/12.842950

4 February 2010 Nanoengineered surfaces for microfluidic-based thermal management devices

Evelyn N. Wang, Rong Xiao, Kuang-Han Chu

Proceedings Volume 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX; 759202 (2010) https://doi.org/10.1117/12.842950
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Microfluidic systems offer compact and efficient thermal management strategies. In this work, we investigate novel nanostructured surfaces to control fluidic behavior and enhance heat dissipation in microfluidic systems. We fabricated silicon nanopillars ranging from 200 nm to 800 nm in diameter and heights of approximately 5 μm. In the presence of notches on the pillars, the liquid separates into multiple layers of liquid films. The thicknesses of the liquid layers subsequently increase as the film propagates, which is determined by the specific position and geometry of the notches. In the presence of asymmetric nanopillars, where the pillars have deflection angles ranging from 0-50 degrees, directional spreading of water droplets can be achieved. The liquid spreads only in the direction of the pillar deflection and becomes pinned on the opposite interface. We performed detailed measurements and developed models to predict the behavior based on pillar geometries. These studies provide insight into the complex liquid-nanostructure interactions, which show great potential to design nanostructures to achieve high flux thermal management solutions.

Citation Download Citation

Evelyn N. Wang, Rong Xiao, and Kuang-Han Chu "Nanoengineered surfaces for microfluidic-based thermal management devices", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 759202 (4 February 2010); https://doi.org/10.1117/12.842950

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available