Packaged bulk micromachined triglyceride biosensor

S. V. Mohanasundaram; S. Mercy; P. V. Harikrishna; Kailash Rani; Enakshi Bhattacharya; Anju Chadha

doi:10.1117/12.846477

4 February 2010 Packaged bulk micromachined triglyceride biosensor

S. V. Mohanasundaram, S. Mercy, P. V. Harikrishna, Kailash Rani, Enakshi Bhattacharya, Anju Chadha

Proceedings Volume 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX; 75920G (2010) https://doi.org/10.1117/12.846477
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Estimation of triglyceride concentration is important for the health and food industries. Use of solid state biosensors like Electrolyte Insulator Semiconductor Capacitors (EISCAP) ensures ease in operation with good accuracy and sensitivity when compared to conventional sensors. In this paper we report on packaging of miniaturized EISCAP sensors on silicon. The packaging involves glass to silicon bonding using adhesive. Since this kind of packaging is done at room temperature, it cannot damage the thin dielectric layers on the silicon wafer unlike the high temperature anodic bonding technique and can be used for sensors with immobilized enzyme without denaturing the enzyme. The packaging also involves a teflon capping arrangement which helps in easy handling of the bio-analyte solutions. The capping solves two problems. Firstly, it helps in the immobilization process where it ensures the enzyme immobilization happens only on one pit and secondly it helps with easy transport of the bio-analyte into the sensor pit for measurements.

Citation Download Citation

S. V. Mohanasundaram, S. Mercy, P. V. Harikrishna, Kailash Rani, Enakshi Bhattacharya, and Anju Chadha "Packaged bulk micromachined triglyceride biosensor", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920G (4 February 2010); https://doi.org/10.1117/12.846477

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