In vivo 3D and Doppler OCT imaging using electrothermal MEMS scanning mirrors

Jingjing Sun; Shuguang Guo; Lei Wu; Se-Woon Choe; Brian Sorg; Huikai Xie

doi:10.1117/12.847237

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16 February 2010 In vivo 3D and Doppler OCT imaging using electrothermal MEMS scanning mirrors

Jingjing Sun, Shuguang Guo, Lei Wu, Se-Woon Choe, Brian Sorg, Huikai Xie

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Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 759405 (2010) https://doi.org/10.1117/12.847237
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Most cancers occur inside human body, so endoscopic high-resolution imaging modalities are required for early cancer detection and surgical removal. This paper reports in vivo endoscopic 3D imaging based on optical coherence tomography (OCT). Endoscopic imaging is enabled by integrating rapid-scanning MEMS mirror into a miniature imaging probe. The MEMS mirror has an aperture size of 1 mm by 1 mm and a chip size of 2 mm by 2 mm. The optical scan angle exceeds ±25 V at 6 Vdc, and thus large, constant-velocity, linear scan can be realized. The outer diameter of the probe is only 5 mm. The axial resolution is about 10 μm and the imaging speed is 2.5 frames per second. Doppler OCT imaging has also been demonstrated.

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Jingjing Sun, Shuguang Guo, Lei Wu, Se-Woon Choe, Brian Sorg, and Huikai Xie "In vivo 3D and Doppler OCT imaging using electrothermal MEMS scanning mirrors", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759405 (16 February 2010); https://doi.org/10.1117/12.847237

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