Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics

Jason Tauscher; Wyatt O. Davis; Dean Brown; Matt Ellis; Yunfei Ma; Michael E. Sherwood; David Bowman; Mark P. Helsel; Sung Lee; John Wyatt Coy

doi:10.1117/12.843095

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16 February 2010 Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics

Jason Tauscher, Wyatt O. Davis, Dean Brown, Matt Ellis, Yunfei Ma, Michael E. Sherwood, David Bowman, Mark P. Helsel, Sung Lee, John Wyatt Coy

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Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940A (2010) https://doi.org/10.1117/12.843095
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

The applicability of MOEMS scanning mirrors towards the creation of "flying spot" scanned laser displays is well established. The extension of this concept towards compact embedded pico-projectors has required an evolution of scanners and packaging to accommodate the needs of the consumer electronics space. This paper describes the progression of the biaxial MOEMS scanning mirrors developed by Microvision over recent years. Various aspects of the individual designs are compared. Early devices used a combination of magnetic quasistatic actuation and resonant electrostatic operation in an evacuated atmosphere to create a projection engine for retinal scanned displays. Subsequent designs realized the elimination of both the high voltage electrostatic drive and the vacuum package, and a simplification of the actuation scheme through proprietary technical advances. Additional advances have doubled the scan angle capability and greatly miniaturized the MOEMS component while not incurring significant increase in power consumption, making it an excellent fit for the consumer pico-projector application. The simplicity of the scanned laser-based pico-projector optical design enables high resolution and a large effective image size in a thin projection engine, all of which become critical both to the viability of the technology and adoption by consumers. Microvision's first scanned laser pico-projector is built around a MOEMS scanning mirror capable of projecting 16:9 aspect ratio, WVGA display within a 6.6 mm high package. Further evolution on this path promises continued improvement in resolution, size, and power.

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Jason Tauscher, Wyatt O. Davis, Dean Brown, Matt Ellis, Yunfei Ma, Michael E. Sherwood, David Bowman, Mark P. Helsel, Sung Lee, and John Wyatt Coy "Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940A (16 February 2010); https://doi.org/10.1117/12.843095

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