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16 February 2010 Optical position feedback and phase control of MOEMS scanner mirrors
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Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940K (2010)
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
Resonantly driven oscillating MOEMS mirrors are used in various fields in optics, telecommunications and spectroscopy. One of the important challenges in this context is to assure stable resonant oscillation with well controlled amplitude under varying environmental conditions. For this reason, we developed a compact device comprising a resonant MOEMS micro-mirror, optical position sensing, and driver electronics, with closed loop control, which ensures operation close to the mirror resonance. In this contribution we present this device and show experimental results with a 23 kHz MOEMS mirror, which demonstrate its capabilities and limitations.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Tortschanoff, M. Lenzhofer, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, and A. Kenda "Optical position feedback and phase control of MOEMS scanner mirrors", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940K (16 February 2010);

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