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17 February 2010 Miniaturized tunable integrated Mach-Zehnder MEMS interferometer for spectrometer applications
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Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940T (2010) https://doi.org/10.1117/12.843658
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
Abstract
In this work a novel miniaturized Mach-Zehnder MZ interferometer fabricated by Deep Reactive Ion Etching DRIE technology on an SOI wafer is presented. The new structure is based on the use of two Si/Air beam splitters, and two metallic mirrors fabricated monolithically in a small footprint measuring 1 mm × 2 mm on the die. By moving the mirrors using an integrated comb drive actuator, the structure is tested as an FTIR spectrometer and the two wavelengths 1550 nm and 1575 nm have been successfully identified using it. The successful implementation of this 4 elements interferometer in an integrated form opens the door for more complicated optical structures self aligned and fabricated in a one step lithography process
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Diaa Khalil, Haitham Omran, Mostafa Medhat, and Bassam Saadany "Miniaturized tunable integrated Mach-Zehnder MEMS interferometer for spectrometer applications", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940T (17 February 2010); https://doi.org/10.1117/12.843658
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