Paper
25 February 2010 Silicon based 2-dimensional slot waveguides
Author Affiliations +
Proceedings Volume 7598, Optical Components and Materials VII; 75980E (2010) https://doi.org/10.1117/12.841707
Event: SPIE OPTO, 2010, San Francisco, California, United States
Abstract
We present novel 2-dimensional slot waveguide schemes. Such geometries allow high confinement for both quasi-TE and the quasi-TM modes in the lower index slot material. Dependence of quasi-TE and quasi-TM mode properties such as effective index and confinement factors on geometrical and material parameters of different waveguide structures is studied. Optimal structure depends on the targeted functionality. For example, 2-dimensional slot waveguides to achieve non-birefringent structures are presented.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Khanna, T. Alasaarela, A. Säynätjoki, A. Tervonen, and S. Honkanen "Silicon based 2-dimensional slot waveguides", Proc. SPIE 7598, Optical Components and Materials VII, 75980E (25 February 2010); https://doi.org/10.1117/12.841707
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KEYWORDS
Waveguides

Silicon

Polarization

Silica

Lithography

Plasma enhanced chemical vapor deposition

Birefringence

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