Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method

Xiaolong Wang; Xinyuan Dou; Xiaohui Lin; Ray T. Chen

doi:10.1117/12.841173

23 February 2010 Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method

Xiaolong Wang, Xinyuan Dou, Xiaohui Lin, Ray T. Chen

Author Affiliations +

Proceedings Volume 7607, Optoelectronic Interconnects and Component Integration IX; 76070R (2010) https://doi.org/10.1117/12.841173
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

In this paper, we presented fabrication of nickel based metal mold with 45° tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45° tilted angle, a 50μm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5°. The polymeric waveguide array with 45° micromirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.

Citation Download Citation

Xiaolong Wang, Xinyuan Dou, Xiaohui Lin, and Ray T. Chen "Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method", Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070R (23 February 2010); https://doi.org/10.1117/12.841173

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