Silicon-integrated photonic circuit for a single-stage large-angle beam steering optical phased array

David Kwong; YaZhao Liu; Amir Hosseini; Yang Zhang; Beomsuk Lee; Cheyun Lin; Ray T. Chen

doi:10.1117/12.843833

23 February 2010 Silicon-integrated photonic circuit for a single-stage large-angle beam steering optical phased array

David Kwong, YaZhao Liu, Amir Hosseini, Yang Zhang, Beomsuk Lee, Cheyun Lin, Ray T. Chen

Proceedings Volume 7607, Optoelectronic Interconnects and Component Integration IX; 760713 (2010) https://doi.org/10.1117/12.843833
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

In this paper, we present the results of the design and fabrication of a 12 channel nano-membrane-based optical phased array that allows for large angle beam steering operating at wavelength=1.55μm. Our device is fabricated on silicon-oninsulator using standard CMOS process. By implementing unequally spaced waveguide array elements, we can relax the half-wavelength spacing requirement for large angle beam steering, thereby avoiding the optical coupling between adjacent waveguides and reducing the side-lobe-level of the array radiation pattern. 1D beam steering of tranverseelectric polarized single mode light is designed to be achieved thermo-optically through the use of thin film metal phase shifters.

Citation Download Citation

David Kwong, YaZhao Liu, Amir Hosseini, Yang Zhang, Beomsuk Lee, Cheyun Lin, and Ray T. Chen "Silicon-integrated photonic circuit for a single-stage large-angle beam steering optical phased array", Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 760713 (23 February 2010); https://doi.org/10.1117/12.843833

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