Paper
12 February 2010 Compact hybrid Si microring lasers
Author Affiliations +
Proceedings Volume 7616, Novel In-Plane Semiconductor Lasers IX; 76160T (2010) https://doi.org/10.1117/12.843331
Event: SPIE OPTO, 2010, San Francisco, California, United States
Abstract
In this paper we review the recent progress in developing compact microring lasers on the hybrid silicon platform. A simplified self-aligned process is used to fabricate devices as small as 15 μm in diameter. The optically-pumped, continuous wave (cw) devices show low threshold carrier density, comparable to the carrier density to reach material transparency. In the electrically-pumped lasers, the short cavity length leads to the minimum laser threshold less than 5 mA in cw operation. The maximum cw lasing temperature is up to 65 °C. Detailed studies in threshold as a function of coupling coefficient and bus waveguide width are presented. Surface recombination at the dry-etched exposed interface is investigated qualitatively by studying the current-voltage characteristics. Ring resonator-based figures of merits including good spectral purity and large side-mode suppression ratio are demonstrated. Thermal impedance data is extracted from temperature-dependent spectral measurement, and buried oxide layer in silicon-on-insulator wafer is identified as the major thermal barrier to cause high thermal impedance for small-size devices. The demonstrated compact hybrid ring lasers have low power consumption, small footprint and dynamic performance. They are promising for Si-based optical interconnects and flip-flop applications.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Di Liang, John E. Bowers, Marco Fiorentino, and Raymond G. Beausoleil "Compact hybrid Si microring lasers", Proc. SPIE 7616, Novel In-Plane Semiconductor Lasers IX, 76160T (12 February 2010); https://doi.org/10.1117/12.843331
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KEYWORDS
Silicon

Waveguides

Photodetectors

Microrings

Resonators

Etching

Semiconductor lasers

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