High-power ultra-short pulse UV laser system

Junewen Chen; Jung-Chao Chen; Shu-Yuan Lin; Chia-Hao Yeh; Chin-Yi Liu

doi:10.1117/12.851845

2 December 2009 High-power ultra-short pulse UV laser system

Junewen Chen, Jung-Chao Chen, Shu-Yuan Lin, Chia-Hao Yeh, Chin-Yi Liu

Proceedings Volume 7631, Optoelectronic Materials and Devices IV; 763114 (2009) https://doi.org/10.1117/12.851845
Event: Asia Communications and Photonics, 2009, Shanghai, Shanghai , China

Abstract

We have developed a terawatts high intensity, sub-hundred femtosecond ultra-short pulses, 248.6 nm ultraviolet laser systems, with dye seed laser in blue-green regime, amplified in the multi-stage dye amplifiers and then frequency doubled and finally amplified with multiple-passes KrF amplifier. We have characterized the system performances, the amplified interaction volume, the amplified spontaneous emission optimization, the Excimer amplifier and the system merits.

Citation Download Citation

Junewen Chen, Jung-Chao Chen, Shu-Yuan Lin, Chia-Hao Yeh, and Chin-Yi Liu "High-power ultra-short pulse UV laser system", Proc. SPIE 7631, Optoelectronic Materials and Devices IV, 763114 (2 December 2009); https://doi.org/10.1117/12.851845

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