The electrical properties of the diamond field effect transistor

Yi Zhang; Lin-jun Wang; Jian Huang; Ke Tang; Fengjuan Zhang; Qian Fang; Qingkai Zeng; Run Xu; Jijun Zhang; Jiahua Min; Yiben Xia

doi:10.1117/12.854267

2 December 2009 The electrical properties of the diamond field effect transistor

Yi Zhang, Lin-jun Wang, Jian Huang, Ke Tang, Fengjuan Zhang, Qian Fang, Qingkai Zeng, Run Xu, Jijun Zhang, Jiahua Min, Yiben Xia

Author Affiliations +

Proceedings Volume 7631, Optoelectronic Materials and Devices IV; 76312Q (2009) https://doi.org/10.1117/12.854267
Event: Asia Communications and Photonics, 2009, Shanghai, Shanghai , China

Abstract

200 μm thick free-standing polycrystalline diamond film has been grown by microwave plasma chemical vapor deposition (MPCVD) method. The nucleation surface of diamond is characterized by Raman scattering, scanning electron microscopy (SEM) and atomic force microscopy (AFM) method. AFM and SEM results indicate the nucleation surface is quite smooth with a mean surface roughness (RMS) of about 10 nm. Raman scattering result indicates of high quality nucleation diamond film. A diamond field effect transistor is fabricated on hydrogenated diamond nucleation surface, using standard lithographic procedures. Device with aluminum (Al) gate electrode, to form Schottky barrier with diamond, as well as Au source and drain electrodes to form ohmic contact with diamond, operates as effective enhancement-mode metal-semiconductor field-effect transistors at room temperature, showing clear modulation of channel current.

Citation Download Citation

Yi Zhang, Lin-jun Wang, Jian Huang, Ke Tang, Fengjuan Zhang, Qian Fang, Qingkai Zeng, Run Xu, Jijun Zhang, Jiahua Min, and Yiben Xia "The electrical properties of the diamond field effect transistor", Proc. SPIE 7631, Optoelectronic Materials and Devices IV, 76312Q (2 December 2009); https://doi.org/10.1117/12.854267

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available