Sub-nanometer calibration of CD-SEM line width by using STEM

Kiyoshi Takamasu; Kazuki Kuwabara; Satoru Takahashi; Takeshi Mizuno; Hiroki Kawada

doi:10.1117/12.846436

1 April 2010 Sub-nanometer calibration of CD-SEM line width by using STEM

Kiyoshi Takamasu, Kazuki Kuwabara, Satoru Takahashi, Takeshi Mizuno, Hiroki Kawada

Proceedings Volume 7638, Metrology, Inspection, and Process Control for Microlithography XXIV; 76381K (2010) https://doi.org/10.1117/12.846436
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

The novel calibration method of sub-nanometer accuracy for the line width measurement using STEM images is proposed to calibrate CD-SEM line width measurements. In accordance with the proposed method, the traceability and reference metrology of line width standards are established using Si lattice structures. First, we define the edge of a line as the end of Si lattice structure as the interface between Si lattice and oxide film. Second, an image magnification and inclination angles are calculated using 2D Fourier analysis of a STEM image. Third, the edge positions of the line are detected after the novel noise reduction method using averaging by Si lattice patterns. Then, the uncertainty of the line width measurement is evaluated with the uncertainty contributors of pixel size, edge detections and repeatability. Using the proposed method, the expanded uncertainty less than 0.5 nm for the line width of 45 nm is established.

Citation Download Citation

Kiyoshi Takamasu, Kazuki Kuwabara, Satoru Takahashi, Takeshi Mizuno, and Hiroki Kawada "Sub-nanometer calibration of CD-SEM line width by using STEM", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76381K (1 April 2010); https://doi.org/10.1117/12.846436

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available