Mesh patterning process for 40nm contact hole

Kilyoung Lee; Cheolkyu Bok; Jaeheon Kim; Hyunkyung Shim; Junggun Heo; Junghyung Lee; Hyeong-Soo Kim; Donggu Yim; Sung-Ki Park

doi:10.1117/12.846388

30 March 2010 Mesh patterning process for 40nm contact hole

Kilyoung Lee, Cheolkyu Bok, Jaeheon Kim, Hyunkyung Shim, Junggun Heo, Junghyung Lee, Hyeong-Soo Kim, Donggu Yim, Sung-Ki Park

Author Affiliations +

Proceedings Volume 7639, Advances in Resist Materials and Processing Technology XXVII; 76391S (2010) https://doi.org/10.1117/12.846388
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Contact hole patterning is more difficult than line/space patterning as mask error factor is higher in contact hole patterning which has 2-dimensional patterns. As the industry moves towards 40nm node and beyond, the challenges associated with contact hole having a manufacturable process window have become increasingly difficult. Current 1.35NA ArF lithography is capable of printing 50nm contact hole with a stable process window at best. Conventional contact hole patterning processes such as resist reflow and RELACS are no longer able to be used for half-pitch 40nm contact hole pattern because we have to shrink not only hole diameter but also pattern pitch. In this paper, we will demonstrate and compare the patterning performance of the mesh patterning processes including litho-etch-litho-etch, cap freezing and self freezing process.

Citation Download Citation

Kilyoung Lee, Cheolkyu Bok, Jaeheon Kim, Hyunkyung Shim, Junggun Heo, Junghyung Lee, Hyeong-Soo Kim, Donggu Yim, and Sung-Ki Park "Mesh patterning process for 40nm contact hole", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 76391S (30 March 2010); https://doi.org/10.1117/12.846388

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available