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30 March 2010 Improving material-specific dispense processes for low-defect coatings
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Minimizing defects in spin-on lithography coatings requires a careful understanding of the interactions between the spin-on coating material and the filtration and dispense system used on the coating track. A wet-developable bottom anti-reflective coating (BARC) was examined for its interaction with polyamide and UPE media when utilizing the Entegris IntelliGen Mini dispense system. In addition, a new method of priming the filter and pump is described which improves the wetting of the filter media, preventing bubbles and other defect-generating air pockets within the system. The goal is to establish plumb-on procedures that are material and hardware specific to avoid any defect problems in the coating process, as well as to gain a better understanding of the chemical and physical interactions that lead to coating defects. Liquid particle counts from a laboratory-based filtration stand are compared with on-wafer defects from a commercial coating track to establish a correlation and allow better prediction of product performance. This comparison in turn will provide valuable insight to the engineering process of product filtration and bottling at the source.
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Brian Smith, Raul Ramirez, Jennifer Braggin, Aiwen Wu, Karl Anderson, John Berron, Nick Brakensiek, and Carlton Washburn "Improving material-specific dispense processes for low-defect coatings", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 763929 (30 March 2010);

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