Design and fabrication of a sensor integrated MEMS/NANO-skin system for human physiological response measurement

Hongjie Leng; Yingzi Lin

doi:10.1117/12.846934

31 March 2010 Design and fabrication of a sensor integrated MEMS/NANO-skin system for human physiological response measurement

Hongjie Leng, Yingzi Lin

Author Affiliations +

Proceedings Volume 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010; 76471V (2010) https://doi.org/10.1117/12.846934
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2010, San Diego, California, United States

Abstract

Human state in human-machine systems highly affects the system performance, and should be monitored. Physiological cues are more suitable for monitoring the human state in human-machine system. This study was focused on developing a new sensing system, i.e. NANO-Skin, to non-intrusively measure physiological cues from human-machine contact surfaces for human state recognition. The first part was to analyze the relation between human state and physiological cues. Generally, heart rate, skin conductance, skin temperature, operating force, blood alcohol concentration, sweat rate, and electromyography have close relation with human state, and can be measured from human skin. The second part was to compare common sensors, MEMS sensors, and NANO sensors. It was found that MEMS sensors and NANO sensors can offer unique contributions to the development of NANO-Skin. The third part was to discuss the design and manufacture of NANO-Skin. The NANO-Skin involves five components, the flexible substrate, sensors, special integrated circuit, interconnection between sensors and special integrated circuit, and protection layer. Experiments were performed to verify the measurement accuracy of NANO-Skin. It is feasible to use NANO-Skins to non-intrusively measure physiological cues from human-machine contact surfaces for human state recognition.

Citation Download Citation

Hongjie Leng and Yingzi Lin "Design and fabrication of a sensor integrated MEMS/NANO-skin system for human physiological response measurement", Proc. SPIE 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010, 76471V (31 March 2010); https://doi.org/10.1117/12.846934

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available