This PDF file contains the front matter associated with SPIE Proceedings Volume 7655, including the Title Page, Copyright information, Table of Contents, and the Conference Committee listing.

Optical and medical industries are demanding a large variety of optical elements exhibiting complex geometries and multitude opto-functional areas in the range of a few millimeters [1]. Therefore, mold inserts made of steel or carbides must be finished by polishing for the replication of glass and plastic lenses [2]. For polishing theses complex components in the shape of localized cavities or grooves the application of rotating polishing pads is very limited. Established polishing processes are not applicable, so state of the art is a time consuming and therefore expensive polishing procedures by hand. An automated process with conventional polishing machines is impossible because of the complex mold insert geometry. The authors will present the development of a new abrasive polishing process for finishing these complex mold geometries to optical quality. The necessary relative velocity in the contact area between polishing pad and workpiece surface is exclusively realized by vibration motions which is an advantage over vibration assisted rotating polishing processes. The absence of rotation of the pad opens up the possibility to machine new types of surface geometries. The specific influence factors of vibration polishing were analyzed and will be presented. The determination of material removal behavior and polishing effect on planar steel samples has shown that the conventional abrasive polishing hypothesis of Preston is applicable to the novel vibration polishing process. No overlaid chemical material removal appears.

Critical to the deployment of large surveillance optics into the space environment is the generation of high quality optics. Traditionally, aluminum, glass and beryllium have been used; however, silicon carbide becomes of increasing interest and availability due to its high strength. With the hardness of silicon carbide being similar to diamond, traditional polishing methods suffer from slow material removal rates, difficulty in achieving the desired figure and inherent risk of causing catastrophic damage to the lightweight structure. Rather than increasing structural capacity and mass of the substrate, our proprietary sub-aperture aspheric surface forming technology offers higher material removal rates (comparable to that of Zerodur or Fused Silica), a deterministic approach to achieving the desired figure while minimizing contact area and the resulting load on the optical structure. The technology performed on computer-controlled machines with motion control software providing precise and quick convergence of surface figure, as demonstrated by optically finishing lightweight silicon carbide aspheres. At the same time, it also offers the advantage of ideal pitch finish of low surface micro-roughness and low mid-spatial frequency error. This method provides a solution applicable to all common silicon carbide substrate materials, including substrates with CVD silicon carbide cladding, offered by major silicon carbide material suppliers. This paper discusses a demonstration mirror we polished using this novel technology. The mirror is a lightweight silicon carbide substrate with CVD silicon carbide cladding. It is a convex hyperbolic secondary mirror with 104mm diameter and approximately 20 microns aspheric departure from best-fit sphere. The mirror has been finished with surface irregularity of better than 1/50 wave RMS @632.8 nm and surface micro-roughness of under 2 angstroms RMS. The technology has the potential to be scaled up for manufacturing capabilities of large silicon carbide optics due to its high material removal rate.

A wavelength selection method by a Fabry-Perot etalon in cavity is reported, helping weak line in laser cavity emitting. Comparing with other wavelength selection methods, this method can provide better resolution of lines, more output power and need shorter length of cavity. A series of experiments are done to test the output properties of the 629nm He-Ne Laser. The wavelength selection method in He-Ne Laser by internal F-P etalon could choose the needed one from two nearby lines no matter how close they are. That makes it possible to select wavelength especially for the nearby lines with gain of sharp contrast in other Lasers.

Microstructures of silicon induced by pulsed laser irradiation were investigated. Microstructure evolution induced by two different laser configurations (lasers with wave length of 355 nm and 532 nm) was characterized by scanning electron microscopy. The measurement results show that periodic structure and villous structure were fabricated on silicon surface by varying the intensity of the applied lasers under atmospheric conditions. Regardless of the laser configurations used, it is found that the used laser intensity plays an important role in the microstructure formation. At low laser intensity, the main character of the irradiated surface is periodic ripples and the period of ripple structure is about 400 nm. Villus structure is the main feature formed with the increase of laser intensity. The mechanism of the villus formation induced by laser irradiation was proposed. Based on the experimental results, the clusters induced by laser irradiation recombine with each other and grow under the increase of laser intensity. During irradiation, the induced plasma expanded upward from the target surface. The clusters and ions in the plume collided with each other. Besides, the collision also happened between molecules of air and the clusters originated from target. As a result of numerous collisions, neutral molecules were dissociated into polarized nanoclusters. The induced nanoclusters redeposited on the target surface. The clusters recombine with each other and adhere to protuberance on the surface. This process results in the formation of cluster-assembled villous microstructure. The optical character of the irradiated samples was measured by FT-IR spectroscopy, and the transmission spectra were analyzed.

In this paper, a large-scale NC precision face grinding machine is developed. This grinding machine can be used to the precision machining of brittle materials. The base and the machine body are independent and the whole structure is configured as a "T" type. The vertical column is seat onto the machine body at the middle center part through a double of precision lead rails. The grinding wheel is driven with a hydraulic dynamic and static spindle. The worktable is supported with a novel split thin film throttle hydrostatic lead rails. Each of motion-axis of the grinding machine is equipped with a Heidenhain absolute linear encoder, and then a closed feedback control system is formed with the adopted Fanuc 0i-MD NC system. The machine is capable of machining extremely flat surfaces on workpiece up to 800mmx600mm. The maximums load bearing of the work table is 620Kg. Furthermore, the roughness of the machined surfaces should be smooth (Ra<50nm-100nm), and the form accuracy less than 2μm (±1μm)/200x200mm. After the assembly and debugging of the surface grinding machine, the worktable surface has been self-ground with 60# grinding wheel and the form accuracy is 3μm/600mm×800mm. Then the grinding experiment was conduct on a BK7 flat optic glass element (400mmx250mm) and a ceramic disc (Φ100mm) with 60# grinding wheel, and the measuring results show the surface roughness and the form accuracy of the optic glass device are 0.07μm and 1.56μm/200x200mm, and these of the ceramic disc are 0.52μm and 1.28μm respectively.

The single point diamond turning (SPDT) lathe of vertical flying cutting milling style is one important ultra-precision machining method for Large-aperture optics. To realize ultra-precision machining with SPDT technology, the turning spindle of the machine tools should be with higher stiffness and stability. In this paper, based on finite element method (FEM), an iterative procedure is proposed and implemented to solve the fluid dynamic model and structure model for simulation the couple of air pressure and structure flexibility. Simulation results show that pressure in the air gap makes the plate deform and this deformation produced by the pressure adversely modifies the pressure distribution. Experimental results indicate that the method can predict the aerostatic spindle stiffness accurately, the prediction error is about 2.04%. These results show a relevant influence of the structural flexibility of the bearing on its static performance.

The ultrasonic vibration-assisted machining (UVAM) technology is increasingly attractive for the ultraprecision machining of brittle materials. But the machining mechanism for UVAM is still unknown, especially for the grinding process. In this paper, the kinematical characteristics of two-dimensional vertical ultrasonic vibration-assisted grinding (UVAG) technology are investigated. A consistent physical modeling of the grinding process with ultrasonic vibration assistance is established firstly, which is based on the interaction of individual grinding grains with the workpiece. Then the kinematical equation is deduced, and so does the velocity and acceleration of a single abrasive grit relative to the workpiece in UVAG. The kinematics of a single abrasive grit during 2D UVAG is simulated for the perpendicular vibration mode. The results show that the relation motion of an abrasive grit is altered significantly with the assistance of ultrasonic vibration, and the grinding path is elongated, which will increase the material removal rate per abrasive grit. The most interesting result is that the relative velocity of an abrasive grit in UVAG is changed slightly when compared to that without ultrasonication. While the relative acceleration in UVAG is increasing tremendously, especially for high frequency ratio (a ratio between the vibration frequency to the rotation frequency) condition. This result means that the ultrasonic vibration assistance can introduce a huge acceleration impact on the material in the machining deformation zone by the grinding grit, and may change the material removal mechanism of grinding. Thus it can do a favor to the precision machining of brittle materials. The UVAG experiment of polysilicon shows that the surface roughness is improved and the normal and tangential grinding forces decrease with the increasing of applied voltage, while the axial grinding force increases. The results indicate that the assistance of ultrasonic vibration can result the change of the grinding mechanism of brittle material.

The new challenges in fabricating large scale aspheric reflectors are presented in this paper. Based on the CCOS method of four-dimensional CNC machining, we give a new concept about the computer control processing with Controllable Compliant Tools (CCT). In addition, two research subjects of CCT key technology are proposed, the convergence theory from macro to micro based on maximum entropy principle and the method for dwell time calculating based on Bayesian theory respectively, and the research results are also presented.

Current trends in the development of active optics methods are reviewed. These methods allow generating smooth optical surfaces by either in-situ stressing or stress figuring. Such surfaces are free from ripple errors - i.e. high spatial frequency errors - and thus are useful to achieve high angular resolution and high contrast imaging in astronomy. Interferometric results of many cases from infrared to ultraviolet are displayed in reviewing various telescope optics cases: aspherized corrector plates, near normal incidence on- or off-axis aspherized mirrors, variable curvature mirrors, aberration corrected diffraction gratings, varying aberration compensators. Potential application cases are presented for quasi-tubular monolithic and segmented X-ray telescope mirrors.

Compared with other forms of spectrometer, Offner spectrometer with a concentric structure is offering a lot of advantages, such as a compact structure, better imaging quality, lower distortion, and so on, convex grating on the second mirror is the key-component in it. The efficiency of an optical system plays an important role in application, but the low diffraction efficiency of Laminar grating or sinusoidal grating leads to a disadvantage for using, to solve this problem, blazed grating with much higher diffraction efficiency is a good answer. In application, blaze wavelength of the grating should be chosen in the spectral range with the lowest responsivity for the detector, so a proper blaze angle and theoretical prediction on affects by tolerance are important in designing the convex blazed grating in an Offner spectrometer. Based on the process of designing an Offner spectrometer, this paper deduced an expression for the angle of incidence in YZ-plane on convex grating in Offner spectrometer, then got the corresponding blaze angle, and analyzed affects on blaze wavelength brought by any kinds of tolerance, showed how to make the blaze wavelength work precisely for application, a practical example is also given.

Rounded diamond cutting tools are used for ultraprecision cutting widely. The lapping qualities of the nose arc play a quite important role on the achieved accuracy of the machined surface. Therefore, it is urgent to solve the high-precision lapping problem of the nose arc. Firstly, based on the periodic bond chain (PBC) model, ratio model of material removal rate is proposed for tool nose arc, in which the {100} crystal plane is oriented as the rake face. And then, the optimal lapping direction is obtained for the nose arc of diamond cutting tools. More over, two lapping methods are proposed for tool nose arc according to the formula of material removal amount. The first is the lapping under variable pressure; the other is the lapping under variable time. After that, a new type lapping machine is designed by top-down method of Pro/Engineering. According to the requirements of the tools, a novel measuring method based on atomic force microscope (AFM) is put forward for nose roundness. A complete system is built for lapping of nature diamond cutting tools' nose arc.

Eye model is firstly used to design and assess the performance of intraocular lenses (IOL) with extended depth of focus (DOF), including aspherical IOL, refractive multifocal IOL and diffractive multifocal IOL. The details of design and optimization are given, and the optical performance of the pseudophakic eye with the designed IOLs is assessed with the spot diagram and the visual acuity. For the pseudophakic eye with 3mm pupil, when the spherical aberration is fully corrected by the aspherical IOL, the best visual acuity reaches 1.2 with a DOF of only 1.4D. Whereas when the spherical aberration is 0.4λ, the best visual acuity is 0.9 with a DOF as much as 2.2D. With the implantation of refractive or diffractive multifocal IOL, the pseudophakic eye has fairly good distant and near vision, while the intermediate vision is worse. Diffractive multifocal IOL diverts 81% of the input light to two primary focuses equally, with the additional 19% of the light wasted as higher order diffraction. Refractive multifocal IOL diverts all the light to two focuses but the light distribution varies with the pupil diameter.

Optical devices are components which require sophisticated equipment and technically skilled manpower for device fabrication and assembling and most of the production costs are on the device assembly. However, the next generation optical components may not be devices assembled at the production line but it will be based on the concept of 'do-it yourself' optical devices. We proposed a simple low-cost acrylic-based Y-branch POF coupler which can be assembled easily by the end users themselves. The device is composed of three sections: an input POF waveguide, an intermediate adjustable hollow waveguide taper region and output POF waveguides. Low cost acrylic-based material has been used for the device material. A desktop high speed CNC engraver is utilized to produce the mold inserts used for the optical device. In addition to the engraved device structure, 4 holes are drilled at each corner to allow a top plate to be screwed on top and enclosed the device structure. Included with this POF coupler assembly kit will be the mold insert, top acrylic block, input and output POF fibers (cleaved and stripped with different stripping lengths) and connecting screws. The short POF fibers are inserted into the engraved slots at the input and output ports until the fibers are positioned just before or butt-coupled to each other. The assembling is completed when the top plate is positioned and the connecting screws are secured. The POF coupler has an average insertion loss of 5.8 ± 0.1 dB, excess loss of 2.8 dB and a good coupling ratio of 1:1.

Lightweight mirror is a key part in image-stabilized day/night optoelectronic observe/aim system. It is made of special structure titanium alloy base with sintered layer of optical glass. To meet with the requirement to reduce weight, honeycomb structure is adopted on the titanium alloy substrate. The depth of the optical glass is very thin. Due to its special & complex structure, high index requirement on image-stabilized technology, technology efficiency is very low with traditional polishing, and the quality is not stable. The loop polishing machine characterized with its stressless machining, is a kind of plain polishing machine tool, which has unique advantage in plain polishing machining of high accuracy large size and extra thin, changeable optical elements. We adopt loop-polishing technology in large area lightweight mirror machining. After parts fine grinding, first we adopt traditional polishing technique to conform pre-polishing for parts, then perform stressless polishing in loop polishing machine. Via tests and batch production, it solves the technical problems such as facial contour control and surface quality of the large area lightweight mirror; its working efficiency is 3-5 times than the traditional polishing technology.

Single-crystal calcium fluoride (CaF₂) is an indispensable optical material for the deep ultraviolet radiation lithography system. The requirement for extremely high performance using in lithography system can be not satisfied by using conventional polishing because the polishing powder are easy to embed to surface due to its relative softness. In the process of rough finishing of CaF₂, ductile cutting of CaF₂ is considered as a suitable technology instead of tradition polishing to efficiently achieve super-smooth surface without impurity. In this paper, a theoretical and experimental study on the ductile cutting of CaF₂ is presented. An energy model for ductile mode cutting of CaF₂ is developed, in which the critical undeformed chip thickness can be predicted from the workpiece material characteristics and cutting parameters. The model is verified with experimental results from the micro-grooving of CaF₂ on an ultra-precision lathe using a circle diamond crystals tool. The pattern of micro-grooving is inspected using optical microscope, the critical cutting depth of ductile-to-brittle is measured using white-light interferometer. It is shown that the predicted results for the critical undeformed chip thickness corresponding to ductile cutting agree well with the experimental results. Finally, ductile cutting of CaF₂ is carried out under the cutting conditions as the maximum undeformed thickness less than the critical undeformed thickness of 233nm obtained above, ductile mode cutting of CaF₂ has been achieved a super smooth surface with roughness of 3.50nm (Ra) measured by AFM is obtained.

Ultra precision machining processes generate surfaces in optical quality and with sub-micron form accuracies. These specifications can be realised by applying single crystal diamond tools with nanometric edge sharpness. Typical workpiece materials are non-ferrous metals which can be machined without significant tool wear. But for optical mould making these materials have disadvantages regarding tool life in injection moulding of plastics. Alternatively diamond cutting of thermo-chemically treated steel is a new way to machine hardened steel moulds. This paper presents results from the machining of two thermo-chemically treated steel alloys. Analyzing and evaluating the machining results regarding surface integrity will lead to recommendations for the ultra precision machining of nitrocarburized steels. The influence of the thermo-chemically generated compound layer composition on surface quality and tool wear has been investigated. Therefore, diamond turning experiments have been carried out on a five axes ultra precision lathe in different depth beneath the surface. Here, both steels can be machined in optical surface quality with a surface roughness Sa < 10 nm, but the achievable surface quality strongly depends on the depth beneath the surface in which the machining takes place. The results show that with increasing depth beneath the surface the roughness values increase as well. Therefore, diamond machining at the edge between compound layer and diffusion layer has to be avoided to gain the best possible surface quality.

Al-doped ZnO thin film(AZO) has become a type of material which is the first choice to replace the expensive ITO thin film and is the central issue in current research in the field of transparent conductive film because of its properties of high conductivity, high transmittance, low level of pollution, and cheap. In this paper, AZO films were produced by the RF magnetron sputtering under the different growth temperatures condition. The atomic force microscope (AFM), X-ray diffraction (XRD), visible-UV spectrophotometer and the four-point probe (FPP) were used to measure the thin film microstructure, optical properties and electrical characteristics. AFM results show that the film with the smoother surface and the more uniform size distribution grains are obtained by increasing substrate temperature. X-ray diffraction spectra show that with increase of the temperature, the quality of the crystallization of thin films gradually is improved and the the optimum growth temperature is 600 °C. Optical transmission spectra show that the AZO films have high transmittance and band gap of thin films decreases with increasing temperature. The results measured by FPP show that with increase of temperature, sheet resistance decreases.

Three-dimensional molecular dynamics simulation of AFM diamond tip nanoscratching on the (100), (110), (111) crystal faces of single-crystal copper were performed to research the effect on the nanocutting process. The evolvements of subsurface defects are analyzed under different orientation and cutting depth. The results show that the regulations of defects evolvement in different orientation are different in nanocutting process. When AFM diamond tip scratches the (111) orientation of single-crystal copper, there exists dislocation which nucleates beneath the tool and propagates downwards along the (1-11) slide plane. With the decreasing cutting depths, the cutting force peak and averaged cutting force decrease; the cutting force of (111) orientation is biggest, and that of (110) orientation is lowest.

A femtosecond pulsed Ti: sapphire laser micro-manufacturing system was used to investigate the ablation characteristics and material removal mechanisms of wide band gap mold material SiC in theoretical and experimental aspects. Through percussion and parallel processing methods, two kinds of microstructures regarding craters and grooves, which had important specifically applications in micromachining and replication manufacturing, were fabricated in air respectively. Scanning Electron Microscopy (SEM), Talysurf Profilometer (Talysurf), Atomic Force Microscope (AFM) and Optical Microscope (OM) were used to identify and measure the morphological characteristics and chemical composition of the mold material surface before and after processing. The ablation threshold and waist radius were determined according to the numerical relationship between micro craters and laser fluencies, whose results were 0.31J/cm² and 32μm, respectively. Meanwhile, the interacting procedures of samples and photons showed two stages, which were called optical and thermal penetration, with corresponded characteristics 0.13J/cm² and 0.61J/cm². Besides, the femtosecond laser repetition rate, pulse numbers, pulse energy and the scanning velocity effect on the modification microstructures surface geometry were examined systematically. Furthermore, the wide band gap mold sample SiC, combining with the micro grooves and craters' topography, material removal mechanisms were also analyzed in detail.

This paper will describe a new method being used during the finishing of glass displays for mobile electronics including mobile hand held devices and notebook computers. The new method consists of using 3M Trizact^TM Diamond Tile Abrasive Pads. Trizact^TM Diamond Tile is a structured fixed abrasive grinding technology developed by 3M Company. The Trizact^TM Diamond Tile structured abrasive pad consists of an organic (polymeric binder) - inorganic (abrasive mineral, i.e., diamond) composite that is used with a water-based coolant. Trizact^TM Diamond Tile technology can be applied in both double and single side grinding applications. A unique advantage of Trizact^TM Diamond Tile technology is the combination of high stock removal and low sub-surface damage. Grinding results will be presented for both 9 micron and 20 micron grades of Trizact^TM Diamond Tile abrasive pads used to finish several common display glasses including Corning Gorilla^TM glass and Soda Lime glass.

Considering that optics fabrication is based on a constant material removal rate and polishing tool characteristic during the polishing run, one parameter named temperature, which is ignored frequently on account of the consciousness of its unimportance, has been researched in fluid jet polishing process. Thermal sources resulting in the increasing of slurry temperature have been analyzed, and the analysis is proved by simulation with population balance modeling method by Computational Fluid Dynamics Software and experiments. Researches show that the slurry temperature is increasing under way of polishing process before achieving a steady value when the produced heat energy is equal to the one diffusing to surrounding. Experiment show that the temperature of slurry change scarcely with the raise of pressure, and the temperature of polishing region increases with the raise of pressure, because the heat energy produced by impact action and friction diffuse in slurry and workpiece increases with the raise of velocity.

The ion beam figuring is a kind of advanced technology of mirror processing. It has the advantages of high processing precision, high speed and no damage to the mirror surface. The ion beam figuring machine is established by using a one meter diameter vacuum coating plant in this research project. Mechanical scanning device, ion source and workpiece make up of the machine. Water, electricity and gas will be imported to the vacuum chamber. The computer software, extracting the error function between the ion beam processing function and mirror surface function by using the data of interferometer measuring, will calculate the dwell-time function in the course of processing. The computer will control the whole process based on the dwell-time function. The experiment processing indicates that PV will reach 1/14λ and RMS will reach 1/70λ by once ion beam figuring.

Tool wear not only changes its geometry accuracy and integrity, but also decrease machining precision and surface integrity of workpiece that affect using performance and service life of workpiece in ultra-precision machining. Scholars made a lot of experimental researches and stimulant analyses, but there is a great difference on the wear mechanism, especially on the nano-scale wear mechanism. In this paper, the three-dimensional simulation model is built to simulate nano-metric cutting of a single crystal silicon with a non-rigid right-angle diamond tool with 0 rake angle and 0 clearance angle by the molecular dynamics (MD) simulation approach, which is used to investigate the diamond tool wear during the nano-metric cutting process. A Tersoff potential is employed for the interaction between carbon-carbon atoms, silicon-silicon atoms and carbon-silicon atoms. The tool gets the high alternating shear stress, the tool wear firstly presents at the cutting edge where intension is low. At the corner the tool is splitted along the {1 1 1} crystal plane, which forms the tipping. The wear at the flank face is the structure transformation of diamond that the diamond structure transforms into the sheet graphite structure. Owing to the tool wear the cutting force increases.

Off-axis conic aspheric mirrors are crucial components in some optical systems, such as three-mirror-anastigmatic telescopes (TMA). However, because of the swing limitation of lathe, off-axis aspheric mirrors are not easy to fabricate using a general-purpose diamond turning machine. This research demonstrates slow tool servo diamond turning process which allows fabricating off-axis conic aspheric mirrors on-axis. The figure error caused by tool centering error was studied on. An off-axis parabolic mirror was fabricated and actual machining data are discussed. The result proved that proposed approach is capable of fabricating copper off-axis parabolic mirror of 46mm diameter to a form accuracy of 0.736μm in PV error value.

In this letter, LPFGs in standard telecommunication fibers without hydrogen loading were fabricated in air using laser direct writing method, by femtosecond laser pulses with pulse duration of 200 fs and output wavelength of 800 nm. The loss peak of 1430 nm, the transmission loss of 22.86 dB and the FWHM of 6.6 nm were obtained. Temperature dependence of wavelength shift in air was measured by placing the LPFG in a temperature chamber that is temperature controlled in the range of 70 -150 °C. The temperature sensitivities (▵λ/▵T) are estimated by using linearly regression fits, which was 43.2 pm/°C. The linearity of the temperature sensitivities is high and the R-squared values for ▵λ /▵T is larger than 0.9979.

Single crystal germanium is used in infrared spectroscopes and other optical equipment as an excellent infrared optical material. The development of germanium Fresnel lenses not only improves the optical imaging quality but also enables the miniaturization of optical systems. In a previous work, a Fresnel lens with precise curvatures, sharp edges and precise cross-sectional profiles were fabricated. However, sometimes, microcracks will occur to the edge of grooves when the wear of the diamond tool is large in the machining process. In the present work, in order to minimize the effect of the tool tip wear to the groove edge of Fresnel lens, a novel machining process and machining conditions are proposed for fabricating a high-precision Fresnel lens.

Sapphire material is, due to its crystal structure, difficult to machine in an economic way. There is a request for thin, i.e. below 0.2 mm thickness, sub surface damage free wafers to produce sensor elements. ELID -- electrolytic in process dressing -- is an innovative high end grinding technology, using small grain sizes, which enable to manufacture surfaces in a quality that is close to polished. ELID grinding requires exactly aligned machining parameters of the grinding process. To grind sapphire the material's behavior is additionally to be considered. Studies on the necessary oxide layer on the grinding wheel and influences on its build-up process will be presented. The presentation shows the results of comparing grinding experiments on different -- c-plane and r-plane -- sapphire materials. Different tool specifications are used. Infeed and grinding velocity are varied and the results on wear, removal rate and surface quality are shown. The process parameters the stiffness of the machine, the grinding forces and pressure are evaluated. The ELID grinding is compared in its results to conventional grinding steps. The material removal rate on sapphire is relatively small due to the extreme hardness of sapphire. The achieved excellent surface roughness will be discussed.

For the precise alignment for the large aperture space optical systems, we report a feasible way of Computer-aided alignment (CAA) in detail in this paper. Different CAA algorithms are introduced and we used two of them to do the CAA simulation for a self-made coaxial three-mirror optical system. The methods of the wavefront detecting and object source's providing have been put forward for the actual alignment. Based on these methods, CAA results are shown using the sensitivity table algorithm and the merit function regression method respectively. Comparisons are made between these two methods, and the results show that the merit function method shows higher accuracy when the initial misalignments are large.

In recent years, as the development of optics and micro-electronics science and technology, new advances and requirements have brought challenges and opportunities to ultra-precision machining technology, which has become the core technology of the manufacture and represent the highest level of fabrication domain. To meet the new requirement of ultra-precision and ultra-smooth and miniaturization in the advanced optical manufacture field, ultra-precision machining technology using micro machine tool is becoming a good choice to fabricate ultra-precision microstructure surface because of the advantage of low cost, high efficiency and flexibility. In this paper, a micro three-axis ultraprecision milling machine tool is developed, aerostatic guideway drove directly by linear motor is adopted in order to reduce the transfer motion to guarantee the enough stiffness of the machine, and novel numerical control strategy with linear encoders of nanometer-level resolution used as the feedback of the control system is employed to ensure the extremely high motion control accuracy. Excellent nanometer-level micro-movement performance of the axis is proved by motion control experiment. Steps, pyramids and convex lens array microstructures with different scales on material of polyvinyl chloride (PVC) are fabricated based on the ultra-precision micro-milling technology using three different kinds of milling tool, and the cutting performance are observed by the scanning electron microscope(SEM), which prove that ultra-precision micro-milling technology based on micro ultra-precision machine tool is a suitable, economical and optional method for micro manufacture of microstructure array surface on different kinds of materials.

K9 optical glass drilling experiments were carried out. Bright nickel electroplated diamond tools with small slots and under heat treatment in different temperature were fabricated. Scan electro microscope was applied to analyze the wear of electroplated diamond tool. The material removal rate and grinding ratio were calculated. Machining quality was observed. Bond coating hardness was measured. The experimental results show that coolant is needed for the drilling processes of optical glasses. Heat treatment temperature of diamond tool has influence on wearability of diamond tool and grinding ratio. There were two wear types of electroplated diamond tool, diamond grit wear and bond wear. With the machining processes, wear of diamond grits included fracture, blunt and pull-out, and electroplated bond was gradually worn out. High material removal rates could be obtained by using diamond tool with suitable slot numbers. Bright nickel coating bond presents smallest grains and has better mechanical properties. Bright nickel electroplated diamond tool with slot structure and heat treatment under 200°C was suitable for optical glass drilling.

A new planarization technique with an instantaneous tiny-grinding wheel cluster that is based on the magnetorheological (MR) effect is presented in this paper. The B-H curve of the MR polishing fluid is calculated, and the results show that the B-H curve is nearly linear and its relative magnetic permeability is about 2.63. Based on the above results, three designs of the polishing disc with the tiny-grinding wheel cluster are analyzed by using the electromagnetic field finite element simulation software. The simulation results show that the design where the magnetic poles are fixed alternately and contrarily to form a closed magnetic circuit has the optimum effect.

Based on the Sigmund sputtering theory, the material removal characteristics in ion beam figuring process are analyzed. The analysis shows that the footprint of beam removal function and the removal rate vary with different incidence angles, which is validated by experiments on small fused silica samples. These material removal characteristics are valuable in ion beam figuring process, which could be applied to machining spherical surfaces and aspherical surfaces with simple method.

Magnetorheological finishing is a typical commercial application of a computer-controlled polishing process in the manufacturing of precision optical surfaces. Precise knowledge of the material removal characteristic of the polishing tool (influence function) is essential for controlling the material removal on the workpiece surface by the dwell time method. Results from the testing series with magnetorheological finishing have shown that a deviation of only 5% between the actual material removal characteristic of the polishing tool and that represented by the influence function caused a considerable reduction in the polishing quality. The paper discusses reasons for inaccuracies in the influence function and the effects on the polishing quality. The generic results of this research serve for the development of improved polishing strategies, and may be used in alternative applications of computer-controlled polishing processes that quantify the material removal characteristic by influence functions.

For a novel 3SPS+PS parallel bionic processing platform with 4-DOF (degree of freedom) simulating the complex processing path including optical processing and machining, the kinematic model based on Rodrigues parameters is established. The singular configurations of the processing platform are obtained from kinematic poses and geometry essence by means of Grassmann line geometry. The numerical simulations show the motion curves and surfaces of the singular configurations with lower linear variety of rank 1 to 3. Then the distribution characteristics of the singular trajectories are studied. It provides an analytical basis for workspace construction, singularity avoidance, and size optimization of the parallel bionic processing platform, as well as the other parallel manipulators.

The application of 'small tool' based on computer controlled is a breakthrough in modern optical machining. Dwell time distribution calculated by the iterative convolution algorithm is normally expressed by the points of intersection on the grid; however, the polishing tool path is composed of multi-segment polylines in fact. Therefore, it is required to calculate the time required when the polishing tool moved along the polylines on the workpiece surface before polishing. The algorithm to calculate the dwell time on each polyline of the tool path has been developed, thereby the deterministic material removal on workpiece surface by polishing tool can be achieved. A tool path algorithm based on fractal geometry has been developed, and the points of intersection on the grid are used as the endpoints of polylines directly. Each polyline dwell time is presented by the mean value of dwell time of two endpoints. A group of surface error data is simulated with actual parameters by spiral path and fractal path with the same number nodes. The contrasted results show that most of error results of the fractal path are better than spiral path. The intersection algorithm has been developed to optimize fractal path, thereby the fractal path can be used in polishing workpiece surface with various border efficiently.

Based on the researches of abrasion mechanism by abrasive particle, the mechanism of formative middle and high spatial-frequency errors by discrete abrasive particle has been studied. Studies show that the errors are shaped by particle's movement track, the effect of particle pressure's asymmetry, and so on. If the particle act as sliding abrasion on workpiece, the movement track which produce spatial-frequency errors takes on helix. Experiments which are taken with a more rigid lap to restrain the slippage abrasion show that the spatial-frequency errors can be reduced when the particles behavior rolling abrasion on work piece in polishing process. Several factors make the particle pressure asymmetric, in order to reduce the spatial-frequency errors shaped by particle pressure's asymmetry, active semi-rigid tool which can be distorted to fit to the workpiece surface figure is designed to make the particle pressure symmetrical. Experiment with semi-rigid tool is taken, which shows that it can reduce spatial-frequency errors.

Aspheric surfaces are proven to provide significant benefits to a wide variety of optical systems, but the ability to produce high-precision aspheric surfaces has historically been limited by the ability (or lack thereof) to measure them. Traditionally, aspheric measurements have required dedicated null optics, but the cost, lead time, and calibration difficulty of using null optics has made the use of aspheres more challenging and less attractive. In the past three years, QED has developed the Subaperture Stitching Interferometer for Aspheres (SSI-A®) to help address this limitation, providing flexible aspheric measurement capability of up to 200 waves of aspheric departure from best-fit sphere. Some aspheres, however, have thousands of waves of departure. We have recently developed Variable Optical Null (VON) technology that can null much of the aspheric departure in a subaperture. The VON is automatically configurable and is adjusted to nearly null each specific subaperture of an asphere. This ability to nearly null a local subaperture of an asphere provides a significant boost in aspheric measurement capability, enabling aspheres with up to 1000 waves of departure to be measured, without the use of dedicated null optics. We outline the basic principles of subaperture stitching and VON technology, demonstrate the extended capability provided by the VON, and present measurement results from the new Aspheric Stitching Interferometer (ASI®).

Ultra precise figure error correction of optics whether down to the sub-nm RMS level or time-saving with nm-RMS accuracy by using three axes IBF-plants.

This paper researches on the planarization of the large optic wafer in the fast polishing process (FPP). In the FPP, the MRR (material removal rate) of the large optic wafer can reach 5~10 um/h. However, the planarization of the wafer is still a problem. Thus, this paper uses the revised skin model to analyze the non-uniform pressure distribution which results in the non-planarization of the wafer. At last, some experiments are done to see which parameter can be chosen to avoid the non-uniform pressure distribution and get the good wafer planarization.

A stable single-longitudinal-mode erbium-doped fiber laser (EDFL) with complex cavity has been proposed, It consists of main ring cavity, secondary cavity and fiber loop mirror, In this laser, The main ring cavity consists of 980nm laser, erbium-doped fiber, isolater(ISO), wavelength division multiplexer(WDM) and FBG,ISO ensures light field transmitting uniaxially to avoid hole burning in the main ring cavity, an unpumped Er-doped fiber is served as a saturable absorber to suppress Multi-longitudinal-mode, and a fiber ring resonator filter is used to suppress the beating noise.The secondary cavity consists of two Single-mode fiber with different length, and the secondary cavity is joined the main ring cavity by coupler.The Longitudinal mode of complex cavities erbium-doped fiber laser is selected from main ring cavity and secondary cavity, This structure not only play a role in mode selection, and could inhibit the beat frequency.With a fiber Bragg grating (FBG) as a selective wavelength component, single mode output without beating noise is obtained experimentally.The main wavelength is 1550.24nm and the side-mode suppression ration (SMSR) is beyond 50dB , The output power of EDFL is 20.51mW when pumping power is 80 mW , the laser output is stable, the output power fluctuation is less than 0.02% in 25min, EDFL with stabilized single-longitudinal mode is achieved.

At present, people have been dedicated to high-speed and large-capacity optical fiber communication system. Studies have been shown that optical wavelength division multiplexing (WDM) technology is an effective means of communication to increase the channel capacity. Tunable lasers have very important applications in high-speed, largecapacity optical communications, and distributed sensing, it can provide narrow linewidth and tunable laser for highspeed optical communication. As the erbium-doped fiber amplifier has a large gain bandwidth, the erbium-doped fiber laser can be achieved lasing wavelength tunable by adding a tunable filter components, so tunable filter device is the key components in tunable fiber laser.At present, fiber laser wavelength is tuned by PZT, if thermal wavelength tuning is combined with PZT, a broader range of wavelength tuning is appearance . Erbium-doped fiber laser is used in the experiments,the main research is the physical characteristics of fiber grating temperature-dependent relationship and the fiber grating laser wavelength effects. It is found that the fiber laser wavelength changes continuously with temperature, tracking several temperature points observed the self-heterodyne spectrum and found that the changes in spectra of the 3dB bandwidth of less than 1kHz, and therefore the fiber laser with election-mode fiber Bragg grating shows excellent spectral properties and wavelength stability.

The main goal of this paper is to analyze the corresponding relationship between the laser wavelength of the Erbium-doped fiber ring laser with the erbium-doped fiber length and coupler ratio. For the first time, this paper is based on the three-level rate equations, using analytical method, to research and achieve the corresponding relationships. Furthermore, gives the demonstration by experiment. The data of the laser wavelength changing with the erbium-doped fiber length and coupler ratio is achieved. The result shows, when the erbium-doped fiber length is increased, the laser wavelength is moved to the long wavelength, and when the laser wavelength is 1563nm the largest output power is obtained, the optimized erbium-doped fiber length is 11.5m. The phenomenon occurs that the coupler ratio is greater that the output wavelength of the laser is shorter. The result is meaningful for the optimized design of the tunable erbium-doped fiber laser by varying coupler ratio.

Thermal effect of optical system is the key factor influencing high resolution image quality for airborne CCD camera, athermalization is the key technology and leading topic in optical engineering field. The researh field focus on infrared system, however, the visible system is quite few considered. Based on optical compensation method, the conception of general zoom system was proposed to realize athermal design for complex visible refractive system. Three steps of the athermalization was considered as three status of zoom system design, correspondence between the athermal design and zoom system design was established. Firstly a good optical system was designed to satisfy image quality in normal temperature, and then multiple zooming positions were established in actual temperature range from -40°C to +60°C , the excellent imaging quality was obtained by replacing partial materials properly. An optical system in the 0.43um, 0.75um waveband was designed with 650mm focal length, F/5.6 F-number, 5.5° field-of-view by the general zoom method. The results showed the image quality had a reliable performance with -40°C +60°C, and the MTF is higher than 0.5 at the spatial frequency of 70lp/mm, image quality reached the diffraction limit. The MTF decreased only with 5%, the athermal design can meet high resolution requirement for airborne CCD camera in wide temperature range. The atheraml research for visible optical system will further complete athermal theories and technologies, and its study and applications will produce important value for military airborne optical system and space optical system.

Antireflective films are widely applied in optical areas due to their ability of reducing reflection and increasing transmittance of light. A process of depositing antireflective gradient index silica films on fused silica and other optical material surfaces is reported. The films possess the properties of wide-spectrum antireflective transmittance and high laser induced damage threshold. To prepare the film, there is first prepared a silica sol by a controlled proportion of water to alkoxide and a controlled concentration of alkoxide to solution, along with a small amount of catalyst. The prepared sol is dipping deposited onto vitreous substrate, resulting in silica layers with thickness of ~300nm and pore diameter of ~8nm. The silica layer is then etched in order to modify the pores in a graded fashion, forming antireflective gradient index silica films. The films display better than 99.0% transmittance through the entire 1053-350 nm band and laser induced damage threshold as high as 12 J/cm² at 351 nm, meeting a significant technological requirement.

Framework parts are extensively used in aerospace industry and milling is its main processing method. This study aims at the milling of aluminum alloy 2024-T351. With the analysis of the milling cutter structure, the virtual topology technology was used to carry on the pretreatment of the milling cutter model, and the adaptive meshing technique was applied. Johnson-Cook's coupled thermo-mechanical model was used as the material model of workpiece. Johnson-Cook's shear failure principle was used as the material failure criterion. The modified Coulomb's law whose slide friction area is combined with sticking friction was used to compute the friction between tool and workpiece. And a more realistic three-dimensional finite element model of milling was finally established. The process of chip formation was simulated in this model. The distribution of surface residual stress at different spindle speed was obtained through finite element simulating. And with the analysis of the results, the basic affecting law of spindle speed to residual stress of machined surface was found, which provides a basis for practical machining.

Introducing current situation of laser imaging scanning optical system and structure, analyzing the existing limitations of laser imaging scanning optical systems. Proposed a new type of multi-laser imaging scanning optical system based on integrated optical waveguide, analyzing of the new system's working principle and advantages. According to optimized parameters of optical scanning system, the imaging results of the optimization of the film were obtained.

The military optical instrument is expected to stable performance in a wide range of temperature, so athermal optical system of high stability has been the hot topic. The paper puts forward hybrid refractive and diffractive method to athermalize the collimator, by means of which the collimator not only has the image quality approaching to diffractive limit and wider working range of temperature, but also has the characteristics such as small volume, simple structure and can meet the application demands in military use.

After the analysis of the theory of optical thin film optimization design, it is proposed that multi-objective optimization with mixed discrete variable is the essential mathematical model, which can reflect the physical essence of optical thin film design. The optimization algorithm for single objective problem that have been widely used in the fields of optical thin film is only a simplification. Based on this new consideration, and combined with the status of multi-objective optimization research, an immune optimization algorithm for multi-objective optimization problem is adopted to design optical thin film. According to the results of experiments, the idea of applying multi-objective optimization approach to design optical thin film can be achieved in theory and have a bright future.

As a result of the rapid development of optoelectronic technology based on modern optoelectronic devices in laser, infrared and micro optics etc, Optoelectronic Products, which can be applied in both day and night observation, infrared thermal imaging display system and laser ranging devices, came into view and were improved rapidlly. In order to minimize system size and weight, optical system products generally are used in wide spectrum and common optical windows. Windows materials commonly use whole spectrum ZnS, In order to reduce its high reflectance while to harden the surface, thus full spectrum, multi-band antireflection film came into being. Muti-band antireflection films, with excellent spectral properties, mechanical properties and environmental adaptability, were studied by means of material selection, rational design of coatings, ion-assisted technology and the temperature selection, etc. Films were measured in visible, 1.06μm and infrared region with transmittance of 95%~97%. The actual results of technology tests met the optical components JB/T8226-1999 coating standards.

In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the surface of aspheric optical mirror. A novel method of designing deformable polishing lap is brought forward by using PZT actuator. It consists of an aluminum disk which can change surface profile continuously under the control of PZT actuators. When the deformable aspherical polishing lap moves on the surface of aspherical mirror, the needed deformation of each PZT actuator is calculated at any location. After each PZT actuator deforming, the surface profile of deformable aspherical polishing lap is changed to an off-axis surface of aspheric optical mirror at that location. In this paper, the rational of novel deformable polishing lap is introduced, and the calculation formula of PZT actuator deformation is explored also. By using finite element method (FEM), the deforming capability of the novel deformable polishing lap is simulated to reform a hyperboloid mirror with diameter 350mm,k=-1.112155,R=840.0 mm. The results of two type of PZT actuator arrangement are compared and analyzed. The results show that the novel deformable polishing lap can reshape to fit the surface of aspheric mirror and the RMS is less than 2um.

Ion beam bombardment optical substrate surface has become an important part of process of optical thin films deposition. In this work, the K9 optical glass is bombarded by the broad beam cold cathode ion source. The dependence of the K9 glass surface roughness on the ion beam bombardment time, the ion energy, the distance and incident angle are all investigated, respectively. Surface roughness of K9 glass is measured using Talysurf CCI. The experimental results show that when the ion energy is 800ev, the bombardment distance of 20cm, with the ion beam bombardment time increased, the K9 substrate surface roughness first increase and then decrease. When the ion beam bombardment distance is 20cm, bombardment time is 10min, with the bombardment energy increases, substrate surface roughness increase first and then decrease, especially in the ion energy greater than 1200ev, the optical substrate surface roughness rapidly increases. When the ion energy is 800 eV, bombardment time is 10min, with the bombardment distance increase, substrate surface roughness decrease gradually. Furthermore, the incident angle of ion beam plays an important role in improving the K9 glass surface roughness.

In order to obtain the effects of the kinematical state to the profile precision of the fiber optic end surface in the process of lapping and polishing, a kinematical equation of the lap- polisher with the slider-crank movement is developed, and based on these equations and the tribological model of CMP, the dimensionless distribution of the material removal volume (DDMRV) and the trajectory of abrasive grains cutting on the lap-polisher are numerically simulated with the way of stochastic abrasive grains, then the effects of the parameters of the lap-polisher on the uniformity of the DDMRV and the trajectory on the fiber optical end surface are discussed, and the results are that the DDMRV and the trajectory of abrasive grains have rather better value when the crank length E is chosen in a advisable parameter region and the rotational speed n₁ of the crank is increased and the rotation speed n₀ of the guide plate is decreased.

The mode and band gap of electromagnetic wave in lateral restrictions 1-D photonic crystal is studied by the dispersion method. The condition of electromagnetic wave mode is obtained, Take advantage of this condition in conjunction with dispersion method band gap of TE wave and TM wave is calculated. The new band gap structure of flat-panel 1-D photonic crystal is obtained.. For the TE wave: The frequency center forbidden band increases with increase of increment model of quantum number, but decrease with increase of thickness of flat plate; The frequency Width forbidden band increases with increase of increment model of quantum number, but decrease with increase of thickness of flat plate; both the incidence angle center and incidence angle Width of forbidden band increases with increase of increment model of quantum number.

The active stressed lap polishing technology is a kind of new polishing technology that can actively deform the lap surface to become an off-axis asphere according to different lap position on mirror surface and different angle of lap. The pressure of the lap on the mirror is an important factor affecting the grinding efficiency of the optics mirror. The active stressed lap technology using dynamic pressure control solution in the process of polishing astronomical Aspheric Mirror with faster asphericity will provide the advantage like high polishing speed and natural smooth, etc. This article puts emphases on the pressure control technology of the active stressed lap technology. It requires that the active stressed lap keeps symmetrical vertical compression on the mirrors in the process of grinding mirrors. With a background of an active stressed lap 450mm in diameter, this article gives an outline of the pressure control organization, analyzes the principle of pressure control and proposes the limitations of the present pressure control organization and the relevant solutions, designs a digital pressure controller with C32-bit RISC embedded and gives the relevant experimental test result finally.

The process of Ion Beam Figuring (IBF) can be described by a two-dimensional convolution equation which including dwell time. Solving the dwell time is a key problem in IBF. Theoretically, the dwell time can be solved from a two-dimensional deconvolution. However, it is often ill-posed]; the suitable solution of that is hard to get. In this article, a dwell time algorithm is proposed, depending on the characters of IBF. Usually, the Beam Removal Function (BRF) in IBF is Gaussian, which can be regarded as a headstand Gaussian filter. In its stop-band, the filter has various filtering abilities for various frequencies. The dwell time algorithm proposed in this article is just based on this concept. The Curved Surface Smooth Extension (CSSE) method and Fast Fourier Transform (FFT) algorithm are also used. The simulation results show that this algorithm is high precision, effective, and suitable for actual application.

A new approach based on an artificial neural network (ANN) was presented for the prediction of machining precision of optical aspheric grinding. The ANN model is based on Globally Convergent Adaptive Quick Back Propagation algorithm (GCAOBP). A genetic algorithm (GA) was then applied to the trained ANN model to predict the gridding precision. The integrated GCAOBP-GA algorithm was successful in predicting the Root Mean Square of profile error (RMS) of optical aspheric workpiece in parallel grinding method using machining parameters. The results of experiments have shown that RMS of machined workpiece in parallel grinding can be predicted effectively through this approach.

A novel ultra-precision turning method is proposed to machine the aspheric surface. Based on this novel method, the aspheric surface is regarded to be divided into two superimposed parts, base sphere and radial asphericity. The base sphere is machined through the revolution of tool pendulum shaft, while the radial asphericity is processed through the feed movement of micro-displacement mechanism. The machining principle of base sphere and the calculation of radial asphericity are analyzed theoretically. In the end, experiments are carried out on an ultra-precision lathe, and the measured result shows that the P-V value is about 0.27μm.

The polarization properties of a new structure of high birefringence polarization maintaining photonic crystal fibers with elliptical-core triangle lattice of squeezed hexangular structure were explored. The modal birefringence and the first order polarization mode dispersion were analyzed by adopting a full-vector localized basis function method. The numerical results show that the polarization properties are strongly dependent on structural parameters of the PCF. Furthermore, the proposed fiber was fabricated based on MMA monomer polymerization method in situ. The optical properties were measured and modal birefringence was well consistent with numerical calculation.

The rigorous coupled-wave method (RCWM) is extended to calculate the diffraction efficiency of multilayer grating in spectrum with strong absorption. This paper gives a detailed algorithm analysis of the RCWM, an enhanced, numerically stable transmittance matrix approach applied to homogenous layered media is generalized for multilayer grating structure. In order to calculate in the lossy medium, the wave vector of electric field is redefined. This method is programmed to design multilayer grating which is expected to use on Seya-Namioka synchrotron monochromator in vacuum ultraviolet (VUV) spectrum. The influence on diffraction efficiency caused by grating profile and multilayer stack is analyzed theoretically. The diffraction efficiencies of well-designed multilayer gratings are all greater than 10% in 50-110nm region, and they are about two to three times higher than that of the single metallic layer grating which is being used on Seya-Namioka monochromator now.

A new scheme to generate 4.3μm laser, which was based on type phase matching ZnGeP₂(ZGP) optical parametric oscillator(OPO) and pumped by 2.7μm laser, was presented in view of the extensive application of mid-infrared laser in spectroscopy, remote sensing, medicine, environmental protection and military region, especially the important application value of 2.7μm and 4.3μm laser in military. The 2.7μm laser was generated by KTP OPO, which was pumped by 1.06μm Nd:YAG laser. It was compared with other schemes such as ZGP OPO pumped by 2.7μm laser with type I phase matching and the conventional method that pumped by 2.1μm laser. The results show that the new scheme has several advantages in narrower output linewidth, smaller walkoff angle and absorption coefficient of ZGP to pump laser, wider allowance of linewidth and divergence angle of pump laser and higher conversion efficiency. It was investigated experimentally. The experimental scheme and proper parameters were presented. The effects of parameters on the threshold of ZGP OPO were analyzed. The maximal output energy of 2.7μm laser is about 4mJ, the total opticoptic conversion efficiency is about 3% and the output of 4.3μm laser was also achieved, which verified the feasibility of the new scheme.

A method of a static mask design in thickness uniformity is fully described and analyzed by simulations of the film thickness theory, based on the assumption that atoms and molecules emitted by the source travel in straight lines to the substrates, which rotate about the central axis during films deposition. The design method can be practically used for all optical coatings produced by vacuum deposition. The solution of a mask shape is unique for a stationary set of coating parameters. A set of coating parameters include the height of the apex of the dome above the source, the curvature radius of the dome, the distance from the source to the rotation axis of the dome, the emissive characteristics of the source which modify the cosine law of the surface source, the form and area of the source. The influence of coating parameters on shapes of masks is also investigated in this study. The mask obtained by the design is a good initial profile in thickness uniformity during vacuum deposition.

The tunable bandwidth and parametric bandwidth are investigated theoretically and numerically for periodically poled LiNbO₃ based optical parametric amplification. For two different optical parametric amplification geometries, which we called as geometry I and geometry II respectively according to different positions of the wave vector k_s and k_m with respect to wave vector k_p, both the grating period of PPLN and the noncollinear angle θ have optimal values when signal beam can be amplified in a maximum tunable range. With the increase of temperature, the optimal grating period nearlinearly decreased while the optimal noncollinear angle θ almost unchanged. An equation is derived to achieve the optimal grating period for different temperatures. Under the same conditions, the tunable bandwidth we achieved by employing geometry I is closed to that of geometry II. Considering the stability of tunable bandwidth, geometry II should be chose for the actual optical parametric amplification geometry because the tunable bandwidth is insensitive to the small deviation of θ when employing it. The parametric bandwidth varied with grating period and noncollinear angle θ. Compared with the change of θ, parametric bandwidth is sensitive to the variation of grating period. When achieving maximum and flat parametric bandwidth, the optimal grating period and optimal noncollinear angle θ are equal to those at which we obtained the maximum tunable bandwidth.

From the fundamental of the optical aspherical replication technique, relationship among wave error of the emergent wave surface, the profile accuracy of the substrate and the refractive index difference is discussed. Figure of the relationship between wave error of the emergent wave surface and the profile accuracy of the substrate under the condition of three values of the refractive index difference is shown. Theoretical analysis shows that if requirement of the wave error of the emergent wave surface is not extremely strict and index of the resin is proper, the substrate needn't to be polished. Profile graph of the replica using unpolished substrate is provided, and it is compared with profile graph of the mould. Experimental results show that profile of the replica reflects the mould's figure perfectly. The replica's PV and RMS are respectively 0.167λ and 0.022λ, and they are enough small to meet the profile precision requirement of normal optical system.

Progressive addition lenses are a kind of ophthalmic lenses with freeform surface. The surface curvature of the progressive addition lenses varies gradually from a minimum value in the upper, distance-viewing area, to a maximum value in the lower, near-viewing area. A kind of optimizing design method of progressive addition lenses is proposed to improve the optical quality by modifying the vector heights of the surface of designed progressive addition lenses initially. The relationship among mean power, cylinder power and the vector heights of the surface is deduced, and the optimizing factor is also gained. The vector heights of the surface of designed progressive addition lenses initially are used to calculate the plots of mean power and cylinder power based on the principle of differential geometry. The mean power plot is changed by adjusting the optimizing factor. Otherwise, the novel plot of the mean power can also be derived by shifting the mean power of one selected region to another and then by interpolating and smoothing. A partial differential equation of the elliptic type is founded based on the changed mean power. The solution of the equation is achieved by iterative method. The optimized vector heights of the surface are solved out. Compared with the original lens, the region in which the astigmatism near the nasal side on distance-vision portion is less than 0.5 D has become broader, and the clear regions on distance-vision and near-vision portion are wider.

Energy measurement is one of the important issues in the laser inertial confinement fusion (ICF) system. The accurate energy information of the high-energy pulse laser should be obtained before the laser reaches the targets and at the same time the properties of the shooting laser should not be interferenced obviously by the measuring device used in the measurement of high-energy pulse laser. This paper presents a method of measuring the pulse laser with high energy by means of diffraction grating with high damage threshold based on fused silica substrate. By measuring the 1^st diffracted light which plays the role of the sampling beam, the energy of shooting laser is obtained indirectly. According to the requirement of the optical measurement system, the holographic recording system of fabricating fused silica grating with 330mm×330mm aperture is designed reasonably. This sort of beam sampling grating can eliminate the off-axial aberrations of the target lens. After the aberration correction, the diameter of the sampling focal-spot is less than 0.3mm. In order to meet the actual needs of the efficiency of energy sampling, the parameters of the fused silica grating with shallow groove are designed and it realizes 0.2% of sampling efficiency. This fused silica grating with shallow groove has been applied in a practical high-energy laser system and the experimental results show that the energy sampling efficiency and sampling focal-spot are consistent with the theoretical design and fit for the engineering requirements.

Magnetorheological finishing (MRF) is an advanced polishing technique capable of rapidly converging to the required surface figure. This process can deterministically control the amount of the material removed by varying a time to dwell at each particular position on the workpiece surface. The dwell time algorithm is one of the most important key techniques of the MRF. A dwell time algorithm based on the1 matrix equation and optimization theory was presented in this paper. The conventional mathematical model of the dwell time was transferred to a matrix equation containing initial surface error, removal function and dwell time function. The dwell time to be calculated was just the solution to the large, sparse matrix equation. A new mathematical model of the dwell time based on the optimization theory was established, which aims to minimize the 2-norm or ∞-norm of the residual surface error. The solution meets almost all the requirements of precise computer numerical control (CNC) without any need for extra data processing, because this optimization model has taken some polishing condition as the constraints. Practical approaches to finding a minimal least-squares solution and a minimal maximum solution are also discussed in this paper. Simulations have shown that the proposed algorithm is numerically robust and reliable. With this algorithm an experiment has been performed on the MRF machine developed by ourselves. After 4.7 minutes' polishing, the figure error of a flat workpiece with a 50 mm diameter is improved by PV from 0.191λ(λ = 632.8 nm) to 0.087λ and RMS 0.041λ to 0.010λ. This algorithm can be constructed to polish workpieces of all shapes including flats, spheres, aspheres, and prisms, and it is capable of improving the polishing figures dramatically.

The Potassium Dihydrogen Phosphate(KDP) crystal is used as key non-linear optical material in Inertial Confinement Fusion(ICF). Traditional photoprocessing methods such as grinding and polishing are not suitable and Single Point Diamond Fly Cutting is adopted because of its special physicochemical characteristics. A method of observing KDP chips to study cutting mechanics has been presented in this paper. The KDP crystal was processed by a mono diamond tool with arc-nose, and plastic deformation can be found in the inside chip by optical microscope, also apparent transition of brittle fracture to plastic deformation can be found along the width direction of chips. By this method, chips in different cutting parameters were compared to study the relationship between critical thickness of ductile removal and cutting parameters like cutting depth and feedrate. Cutting experiments along different direction on different crystal planes were operated to research anisotropic characteristic of KDP crystal.

For achieving uniform near-field illumination, this paper is based on the theory that each LED is non-perfect Lambertian emitter, whose irradiance distribution obeys the power law. Using the theory of sparrow's criterion, two methods to realizing near-field uniform irradiance of LED arrays are discussed by taking into account of the production process of LED array, a conclusion can be made that adjusting the curve to achieve uniform near-field irradiance is impossible but adjusting the space could. The structural characteristics of three typical LED arrays are analyzed. The equations of the relationship between illumination and space, as well as the optimal arrangements of the LED arrays are given. The nearfield optical properties for LED arrays with the optimal arrangement structure are simulated by MATLAB. By using a photometer we measure the irradiance intensity of the LED arrays, and make comparisons between experimental results and theoretical results, the result shows it works well.

The technical principle of computer controlled optical surfacing (CCOS) and the common method of optimizing removal function that is used in CCOS are introduced in this paper. A new optimizing method time-sharing synthesis of removal function is proposed to solve problems of the removal function being far away from Gaussian type and slow approaching of the removal function error that encountered in the mode of planet motion or translation-rotation. Detailed time-sharing synthesis of using six removal functions is discussed. For a given region on the workpiece, six positions are selected as the centers of the removal function; polishing tool controlled by the executive system of CCOS revolves around each centre to complete a cycle in proper order. The overall removal function obtained by the time-sharing process is the ratio of total material removal in six cycles to time duration of the six cycles, which depends on the arrangement and distribution of the six removal functions. Simulations on the synthesized overall removal functions under two different modes of motion, i.e., planet motion and translation-rotation are performed from which the optimized combination of tool parameters and distribution of time-sharing synthesis removal functions are obtained. The evaluation function when optimizing is determined by an approaching factor which is defined as the ratio of the material removal within the area of half of the polishing tool coverage from the polishing center to the total material removal within the full polishing tool coverage area. After optimization, it is found that the optimized removal function obtained by time-sharing synthesis is closer to the ideal Gaussian type removal function than those by the traditional methods. The time-sharing synthesis method of the removal function provides an efficient way to increase the convergence speed of the surface error in CCOS for the fabrication of aspheric optical surfaces, and to reduce the intermediate- and high-frequency error.

Ultra-precision machine with a fast tool servo (FTS) can fabricate many kinds of optical components with complex micro-structured surfaces, achieving sub-micrometer form accuracy and nanometer surface finish without any subsequent processing. However, it is difficult to meet the ultimate processing requirements only by operators' experience due to the complicate numerical control (NC) programs and various machining parameters. To verify the NC programs, guarantee the processing quality and improve the efficiency, a simulation system is established according to the real micro-structured surface turning system. This system includes cutting force model, platform movement model, fast tool servo model, spindle movement model, vibration model and the surface topography model. Then some simulation results as the motion locus of the tool tip, three-dimensional microstructure morphology and the surface roughness are obtained. By comparing the simulated and actual results, it can be seen that this system can simulate the actual processing, predict the final machining results and has the guidance meaning for the machining of the microstructured surfaces.

The laser reference path serves as the measure standard of the movable mirror displacement and velocity in Fourier Transform Spectrometer (FTS). In the Space-borne Imaging FTS, whose movable mirror is plane, it is also used to measure the tilt of the mirror. So, the quality of the laser interference signal plays an importance role in the instrument. This paper discusses and analyzes the features of the reference laser signal mainly according to the experiment results.

In object simulation equipment, field diaphragm is critical illuminated to obtain the maximum possible light energy. When light source is a tiny surface source, and beam is shaped with parabolic reflect mirror to parallelism. We design the cylindrical lens to reshape the parallel beam to elliptic image spot of 25.4mmx3mm, and imaging in the field diaphragm of simulation system. For the volume restriction, we design a refractive system employed by one piece of meniscus lens and two pieces of cylindrical lens. In x direction, the linear field of image is 25.4mm, and we bring in a certain amount of sphere aberration in order to make light energy uniform distribution in the direction. Meanwhile, in y direction, the image height accords to the requirement by controlling focus distance. Illuminance of marginal field of x direction reaches 95% of that of centre field, which satisfies the system requirement. The configuration of this lens is rather concise and hardly has any problem in processing.

Contaminants are deemed to be the initial source of optical-damage mechanisms as well as the main reason to decrease the Laser Induced Damage Threshold (LIDT) of multilayer dielectric pulse compressor gratings (PCG). In this paper, the Piranha solution was used effectively and nondestructively to remove the residual contaminants on the surface of PCG. The surface cleanliness was evaluated by Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS). The higher removal efficiency was achieved with more times of multiple-cleaning by fresh Piranha solution which has an effectiveness for a given period of time.

The Samples of a kind of martensite stainless steel treated by LSP with different overlapping rate of laser shock spot were used to study the effects of overlapping rate. The surface residual stress and microhardness of the laser shock zone as well as the fatigue life of the samples with different overlapping rate were tested. The results show that: with the increasing overlapping rate, the overlap interspaces between the practical shock notches on samples reduces. Meanwhile, the fluctuation of residual stress and microhardness is significantly decreased. And the fatigue life of the samples is increased. So the conclusion is drawn that increasing overlapping rate can decrease the overlap interspaces, which optimize the distribution of the residual stress and the microhardness around the shock notches, and consequently improve the fatigue life.

Based on the couple-wave analysis theory and the genetic algorithm, a high diffraction efficiency dammann grating with subwavelength structure has been designed and prepared. The array number of diffractive spots is 9 and the feature size achieves 0.92μm. The diffraction efficiency of the grating reaches 92%. By using Electron Beam Direct Writing and Reactive Ion Etching, we patterned the subwavelength structure on the silica. The experimental results show that the subwavelength structure with nanometer resolution can be patterned by computer controlled electron beam scanning exposure. In reactive ion etching, the etching rate and the grating line-shape can be affected by radio frequency (RF) power, system pressure and gas flow. When there are pressure of 6 pa and gas flow of 35cm3/min steadily, etching rate increases nonlinearly with RF power and reaches the peak at 350W. While RF power is higher than 350W, etching rate descends with its increasing and surfaces of grating groove become rough and burned deformed easily. When the RF power and gas flow are steadily, etching rate increases with system pressure reaches the peak at 13Pa, then descends. On the contrary, when the RF power and system pressure are steadily, etch rate decreases with the increase of the gas flow. This paper also analyzes the linewidth error in Electron Beam Direct Writing.

Both cost and performance are important factors used to evaluate the manufacture methods for diffractive optical element (DOE). The diamond turning technology has many advantages of processing diffractive optical element compared with other methods. There are special errors existing in this process which can decrease the performance and limit the application field of the DOE. In this paper, the errors caused by diamond turning technology are analyzed and the calculation results are given.

Conformal domes can improve aerodynamic performance compared with the more traditional flats and spheres domes, but the difficulties for manufacturing and testing are obvious because their particular materials, their constantly changing curvature and steep slopes induce the most conventional polishing and metrology solutions could be incompatible. This paper has researched the technologies of grinding, diamond turning, polishing and testing for polycrystalline magnesium fluoride conformal domes. The processing parameters of different technology were optimized and the appropriate procedure was determined. An ellipsoid conformal dome with 120mm caliber and 1:1.2 slenderness ratio was processed using these technologies. The final generatrix PV value measured using the profile testing instrument is less than 4um and the surface roughness (Ra) is less than 10nm. The work was funded by certain preliminary research project under contract 51318020101.

Cryogenic space remote sensor(CSRS), working on the Sun-synchronous orbit, is used to make observation of deep space and implement scientific research tasks. To observe small targets in deep space, CSRS should have quite low noise. Stray light is a major part of noise that affects the imaging quality, therefore, stray light control is a critical part of CSRS. CSRS is cooled to 10K, and works on the orbit which is never directly illuminated by the Sun and far away from other radiation sources such as the Earth and the Moon, so stray light from these objects can be neglected. This paper focuses on stray light from self thermal emissions of CSRS components, which plays a more important role in acquiring qualified image. Based on the theory of radiation energy transfer in the optical system, a method is proposed to calculate self thermal emission. After analysis of self thermal emission, measures suppressing stray light are put forward. Also in the paper, a few simulations to testify the scheme mentioned above are presented. Component emittance and paint absorbance are measured at various wavelengths as inputs for simulations. The results show that peak value of irradiance is well restricted to meet the system's requirement.

Wave-front coding technology is a novel jointly optical and digital imaging technology which can greatly extend the depth of focus of optical systems. The image restoration process is an important part of wave-front coding technology. Using wave-front coding makes the modulation transfer function(MTF) values of the optical systems change little over a range of several times the depth of focus, which means the system MTF is quite insensitive to defocus, and there is no zero in the passband. So we can design a single filter for the restoration of images in different defocus positions. However, it's hard to avoid noise during image acquisition and transmission processes. These noises will be amplified in the image restoration, especially in the high frequency part when the MTF drop is relatively low. The restoration process significantly reduces the system signal to noise ratio this way. Aimed at the problem of noise amplification, a new algorithm was proposed which incorporated wavelet denoising into the iterative steps of Lucy-Richardson algorithm. Better restoration results were obtained through the new algorithm, effectively solving the noise amplification problem of original LR algorithm. Two sets of identical triplet imaging systems were designed, in one of which the cubic-phase-plate was added. Imaging experiments of the manufactured systems were carried, and the images of a traditional system and a wave-front coded system before and after decoding were compared. The results show that the designed wave-front coded system can extend the depth of focus by 40 times compared with the traditional system while maintaining the light flux and the image plane resolution.

When a U-type 2X zoom optical lens design for Digital Light Processing (DLP) projector was designed by CODE V, we found that the MTF and RI values at position 1 of the maximum field are less then 10% (MTF) and 60% (RI) at 50 lp/mm, which didn't conform the lowest performance. But if we corrected the design to improve the value of MTF, then RI value would become lower and probably not match the requirement relatively. In order to achieve the optimal values of MTF and RI simultaneously, we employed the integration of the Taguchi method and the robust multiple criterion optimization (RMCO) approach to solve such a multiple objective (MTF and RI) optimization problem.

A variety of micro-optics structures can be fabricated using a dual-step anisotropic etching of KOH: H₂O over (100) silicon. A key step of this method is the design of mask layout. In accordance with the expected profile, this paper implemented a set of algorithms through computer programming to design the mask, and after setting a set of parameters, the final etching profile can be simulated. According to the data of the mask layout generated by the program, a lithography mask is fabricated, and then through the single-step lithography and dual-step wet etching, the expected profile is acquired. The mask can be fast and efficiently designed using this method, and through follow-up procedures, many kinds of aspherical and irregular micro-structures can be obtained. In this study, a series of 512x512 arrays of concave lenses are designed using the algorithm, and then the follow-up procedures are carried out using the most appropriate corrosion issues calculated by the program, and finally get a good result. At the end of this study, the lens' surface profile, roughness, and optical performance, etc, are tested. Test results show that the micro lens are very neat, and the hole size and depth of each unit have basically the same size. The surface profile and roughness already achieve optical mirror requirements, and the structures have good optical performances.

3-RPS symmetrical parallel manipulator is the key part of the parallel supporting structure. According to the structure characteristics of the manipulator, three interference conditions of the limbs are obtained and the conditions are appeared after reverse position of the moving platform. So no interference condition can exist in the reachable workspace of the manipulator. The numerical simulations show that the end-effector can augment effectively the workspace. The workspace is symmetrical on X-axis and asymmetrical on Y-axis and Z-axis. Because of the value restriction of structure parameters, the workspace sections of the origin of the moving platform are similar with the curved surface of the endeffector. The extremum of workspace along negative Y-axis is greater than the extremum of workspace along positive Yaxis, but the extremums of workspace along two directions of X-axis are equal.

Computer Controlled Optical Surfacing (CCOS) is widely used for making optical aspheric mirrors. In the practical fabrication, edge effect is an important problem which restricts the fabrication efficiency and accuracy seriously. In this paper, the edge effect is solved by working out the edge removal function and compensate with dwell time function. Skin Model is used to describe the pressure distribution when the tool hangs over the work-piece. The calculation model of edge removal function is derived from Skin Model theoretically. A removal function experiment is completed. The difference between the theoretical model and the experiment results is less than 5%. It means that the calculation model is suit for the practical fabrication. Than the dwell time is solved with edge effect compensation by matrix-based algorithm. In the end, actual experiment was done to validate the edge effect compensation method.

The annular polishing is used to manufacture a rectangle optical flat with high aspect ratio in this paper. To control the polishing conveniently, a theoretical model based on the Preston hypothesis is given. According to the model, the problems related to control the power and the edge effect occurred during the process are analyzed and practically solved. Finally, the surface PV of 60 nm was achieved.

We explore the polarization properties of elliptical-hole square lattice photonic crystal fibers (PCFs) with elliptic fiber core based on polymer. The optical birefringence and polarization-dependent leakage loss are studied numerically based on the full-vector finite element method(FEM). Numerical results show that the proposed fiber has heightened modal birefringence of the order of 10^-2; and the leakage loss is reduced to 0.08dB/m at wavelength of 0.65μm when it has 10 rings of elliptical air-holes. So the proposed PCFs may be useful in the field of high birefringence polarization-maintaining optical communication.

High-precision optical micro-structured components are now widely used in the field of military and civilian use. Ultraprecision machining with a fast tool servo (FTS) is one of the leading methodologies for fabrication of such surfaces. The first important issue that faced in ultra-precision and high-effectively fabricating is how to properly describe the complex shapes based on the principle of FTS. In order to meet the demands of FTS machining that need for tool high-frequency response, high data throughput and huge memory space, an off-line discrete data points generation method for microstructure surfaces is presented which can avoid on-line shape calculation in fabricating process. A new analysis software package is developed to compute the speed, acceleration and spectrum over the generated data points which helps to analysis the tool tracking characteristics needed in fabricating. Also a new mechanism for FTS machining data transmission based on the huge-capacity storage device is proposed. Experiments show that the off-line surface data generation method and data transfer mechanism can effectively improve FTS fabricating efficiency, the surface analysis software can help to determine the machining ability of tool-holder and to guide and optimize the processing parameters such as spindle speed, feed rate, etc.

Nanocrystalline silicon dioxide (SiO₂) films were prepared on aluminium substrates using medium frequency magnetron sputtering. The surface morphology of SiO₂ film on aluminium substrate was observed using atomic force microscopy. The nanohardness and the elastic modulus of the SiO₂ film-aluminium system were measured by a nanoindentation technique. Moreover, optical propertie of SiO₂ film-aluminium system was investigated. It was found that the composition of silicon dioxide films varies from nearly pure Si, SiO to SiO₂, controlled by O₂ flow rate. The reflection index of nanocrystalline SiO₂ film-aluminium system is accord with the mixture rule. All SiO₂ films are transparent and the transmittance increases with increasing O₂ concentration.

The relationship between CVD ZnSe material characteristics and turning surface characteristics was studied in this paper. By using metallographic microscope, scanning electron microscope, X-ray energy spectrometer and 3D surface profiler, the raw material's section and turning surface of CVD ZnSe were observed; the origin of little flaws and annular patterns on turning surface was analyzed. The results show: the defects of CVD ZnSe raw material cause the turning surface defects, some become little pits and some are filled up by chips directly; the polycrystalline structure of CVD ZnSe causes the annular patterns on turning surface, the annular patterns caused by polycrystalline structure of CVD ZnSe can be eliminated by setting appropriate cutting parameters and tool parameters, and the Ra value of smooth turning surface roughness without annular patterns can be under 3nm. The paper establishes the technical foundations for further explore of the turning surface quality control methods.

Ring polishing, also called continuous polishing, plays a very important role in the manufacturing of plane optical components with large aperture. This paper theoretically analyses the problem of calculation and simulation of the uniformity of grinding removal in ring polishing. By using the MATLAB software, a series of simulation figures are given. Firstly, the relative motion path on the polishing lap of a point on the workpiece is obtained by programming. From the simulation results it could draw a conclusion that the motion path is complicated when rotating speed ratio is not equal to one. Thus, it's beneficial to the homogeneous material removal. Focus on the problem of the uniformity of grinding removal, then, this paper elaborates on the effect of material relative removal caused by factors such as rotating speed ratio and eccentricity theoretically. When the size of the workpiece is large enough, it will be outside of the optical polishing pitch lap, and this paper will also discuss the material removal on the whole surface in this case. All the calculation and simulation will guide practice process.

A chemical technology for cleaning super-smooth surface, based on wet method, is put forward in order to solve the problems including that the dirt existing on the surface of optical components is difficult to remove, and the system used to estimate the surface quality is hard to establish. Firstly, in this paper, all kinds of dirt existing on optical surface and their adsorption mechanism are discussed. Secondly, a cleaning route has been designed. Thirdly, all the reagents in use are prepared and their decontamination capabilities are described. Finally, the cleaned optical components are tested. The result shows that the surface cleanliness is high, the defect density is no more than 0.7/mm² within a certain area, and the scattering loss is no more than 20ppm.

In this paper, the single point diamond fly-cutting (SPDF) method, which is applied during processing mirror drum, is mainly studied, and some related experiments are conducted. The method of processing four-surface mirror drum, made of aluminum alloy, is confirmed, in the meanwhile, specifications are tested such as the surface shape and the angle between neighboring mirrors. The result shows that the value of PV distributes 0.2~0.75μm, and the value of angle error, tower error and roughness Rq reaches 5", 10", and 0.008μm respectively.

Amorphous carbon film is one of the most important anti-reflection protective films coated on infrared optical components. In this paper, hydrogen-free amorphous carbon films were deposited by new type surface-wave-sustained plasma (SWP) source with a graphite target at various experiment parameters. The laser Raman spectroscopy at wavelength of 514 nm was used to investigate the structure and bonding of these carbon films. The results showed consanguineous correlations between the intensity ratio I_D/I_G and the experiment parameters such as microwave power, target voltage and gas pressure applied to the SWP source. Raman spectra proved the structure of these carbon films prepared by SWP technique is typical diamond-like carbon (DLC). The analysis on G peak position and intensity ratio I_D/I_G indicated that Raman shifts moves to low wavenumber and I_D/I_G decreases with the increasing of microwave power from 150 W to 330 W. These results means the formation of sp³ bond prefers higher microwave power. DLC films prepared at target voltage of -200 V have higher sp³ content than that of -350 V, moreover, an increase of gas pressure during experiments yields higher sp³ content at the microwave power below 270 W, whereas the change of sp³ content is slight with the various conditions when microwave power exceeds 270 W.

A structural design of spherical compound eye is proposed. Aspherical lenses are fabricated on a spherical shell substrate and serve as channel lenses of the spherical compound eye. Each channel lens incepts lights of certain field of view (FOV) and focuses on a planar photodetector. The spherical compound eye can achieve a large FOV with merits of compact configuration, free assemblage and high capacity usage ratio. However, in this design the focal lengths of different channel lenses are nonuniform. To fabricate tunable channel lens, a method of fabricating tunable aspherical lenses based on shape manipulation by electrostatic field is proposed. The channel lens is fabricated by dropping Ultra- Violet (UV) curable polymer onto a double-concave glass substrate lens. An electrostatic field is employed to manipulate the shape of the liquid lens. The lens shape can be distorted from initial spherical to aspherical. The focal length of the aspherical lens varies as its shape being manipulated. When the in-situ measured focal length and focal spot images satisfy the requirement of a certain channel lens, the liquid aspherical lens can be cured to solid lens and can be used as the channel lens. The experiment results shows that by manipulating the shape of the liquid lens and controlling the liquid volume, the focal length of the lens can be manipulated between 5.5mm and 46.9mm, and keep small optical aberration. These indicate that the aspherical lenses fabricated by this method are tunable and are suitable as channel lenses for the spherical compound eye designed. And it is useful for fabricating spherical compound eye with large FOV.

Future space telescopes require primary mirrors that have larger apertures and less mass than the current ones. To reduce the mass as much as possible, ultra-thin aspheric glass mirrors are used for the optical surface and a rigid, lightweight frame with actuators for support. The accuracy of the optical surface is actively maintained by adjusting the actuators. On the other hand, the ultra-thin spherical glass mirrors can be utilized to shape aspheric ones based on same active optics technology. The method can avoid the difficulty of manufacture and measure for large aspheric surface mirrors. We have built a measurement system for shaping a parabolic surface using a 340mm diameter ultra-thin spherical mirror. According to an existing active support system the theoretical accuracy of parabolic surface figure is presented. The test results show that the method of shaping aspheric ones from spherical surfaces is fully feasible: the surface quality is λ/5 RMS, which is in accord with the simulation analysis. If the best fitting sphere and the array of actuators be suitably chosen, and the initial figure accuracy of ultra-thin spherical surfaces can be increased, the accuracy of shaping aspheric surface will be improved.

The frequency stabilization error is an important error source to limit the precision of four frequency differential ring laser gyro (DILAG) in navigation application. Different from the traditional technology mainly related to frequency stabilization circuits design, this paper introduces a new method to solve the problem. The method can essentially minimize the frequency stabilization sensitivity of DILAG, by applying an outer longitudinal magnetic field to the gain region of DILAG. Through adjusting the value of magnetic field to make the frequency splitting equal to the Faraday splitting, the minimum frequency stabilization sensitivity of DILAG will be available. The physics mechanism and mathematic model of this method are analyzed and set up. Concrete steps to realize the method are given in detail. Experimental results have verified its validity and it can decrease the startup drift. Hence, this new method can improve the performance of DILAG, which will be helpful to navigation application.

A focusing combination scheme based on four incident plane waves with a caliber of 290mm is investigated to enhance the peak power of the shooting laser in the ICF fast ignition. Calculated and simulated results indicate that about 67% energy is focused in the center spot using an optimized paraboloidal mirror, and the light peak intensity is enhanced about 13.95x10¹⁰ times. Besides, the tolerances of the light spot position and the initial phases are analyzed in detail for experiment.

Spiral polishing is a traditional process of computer-controlled optical surfacing. However, the additional polishing amount is great and the center polishing amount is difficult to control. At first, a simplified mathematics model is presented for magnetorheological finishing, which indicates that the center polishing amount and additional polishing amount are proportional to the length and peak value of magnetorheological finishing influence function, and are inversely proportional to pitch and rotation rate of spiral track, and the center polishing amount is much bigger than average polishing amount. Secondly, the relationships of "tool feed way and center polishing amount", "spiral pitch and calculation accuracy of influence matrix for dwell time function solution", "spiral pitch and center polishing amount" and "peak removal rate, dimensions of removal function and center removal amount" are studied by numerical computation by Archimedes spiral path. It shows that the center polishing amount is much bigger in feed stage than that in backhaul stage when the head of influence function is towards workpiece edge in feeding; and the bigger pitch, the bigger calculation error of influence matrix elements; and the bigger pitch, the smaller center polishing amount, and the smaller peak removal rate and dimensions of removal function, the smaller center removal amount. At last, the polishing results are given, which indicates that the center polishing amount is acceptable with a suitable polishing amount rate of feed stage and backhaul stage, and with a suitable spiral pitch during magnetorheological finishing procedure by spiral motion way.

Optical nano-surface is mainly processed by single method, which's high efficiency and high definition are in opposition to each other. The fused silica surface is manufactured with the combination of the Magnetorhelogical manufacturing technology and the Ballonet polishing technology. Finally the high-quality optical nano-surface is achieved which RMS of roughness value is 0.8nm and the sub-surface damage is less.

Atmospheric pressure plasma processing is a method using chemical reaction between active radicals excited by plasma and workpiece surface atoms, which cannot damage the optical surface. A novel atmospheric pressure plasma jet generator has been designed based parallel plate electrode capacitive coupled, in which active fluorine atoms are excited from sulfur hexafluoride when helium acted as plasma generate gas and sulfur hexafluoride and oxygen acted as reactive gas. The removal profile is pseudo-Gauss curved surface, so this method suit for deterministically finishing aspheric and free optical surface controlled by computer. Furthermore, the material removal stability is a key factor for machining deterministically. The Influencing factors of material removal stability have been analyzed include helium flux, machining distance from jet outlet to workpiece and the tilt angle between jet effluent and the surface normal direction. Experiment was conducted with fused quartz material. The results show that the material removal rate is insensitive to the helium flux, machining distance and tilt angle between jet nozzle and workpiece surface at a certain parameters scope.

The optical forces can be used to manipulate the particles whose dimensions ranging from some tens of nanometers to larger than a hundred nanometers. An electromagnetic wave exerting force on a metal particle at the wavelength far from the particle's plasmon resonance wavelength resembles trapping high refractive index dielectric particle. When designing the optical trapping experiments, we must consider the power of the incident light, the optical force produced by the incident light and the size of the particle being manipulated. The trapping of dielectric nanoparticles was studied with numeric simulation of Finite-Difference Time-Domain (FDTD) method. We use the total-field/scattered-field consistency boundary approach in FDTD method to simulate the focused incident beam interacting with the dielectric particles. The ten-cell-thick uniaxial perfectly matched layer (UPML) absorbing boundary condition is introduced to simulate the extension of the computation domain to infinity. The result field distributions in FDTD then are substituted into the Maxwell stress tensor to calculate the optical forces. The numeric simulation demonstrates the possibility of trapping dielectric particles transversely whose radii are comparable to wavelength.

Studying the anisotropy of the KDP crystal processing in theory and experiment, the results had shown that the surface mechanical properties and surface roughness of ultra-precision machining KDP crystal shown a strong anisotropic properties, and concluded that: 1. Applicating the elasticity and crystal physics theory, calculated the elastic modulus and shear modulus on the (100) crystal plane of KDP crystal, it showed that they both exert anisotropic properties and cyclical fluctuations, and four periods fluctuations in a cycle. 2. Through the experiment of ultra-precision machining and mechanical characteristics, it was concluded that elastic modulus, hardness, residual stress and surface roughness which are on the (100) crystal plane of KDP crystal all showed anisotropic properties, and the variation is consistent with the theoretical calculation. The study on the anisotropy of KDP crystal has important theoretical and practical significance on improving the surface quality and ultra-precision machining removal mechanism.

In this paper, brief review of modern spectral techniques and instruments based on AOTF (Acousto-optic Tunable Filter) is presented. Total configuration of the infrared spectrometer with AOTF technique and part main module concrete design is introduced. Such as, Light source is collimated by fiber assembled lens, which can enhance diffraction light and separate diffraction light from transmission light; A MCU (Micro Controlling Unit) controls DDS (Direct Digital Synthesizer) to realize the radio-frequency driver; Real-time differential spectroscopy has been created by two photoelectric sensors, which reduced SNR (signal-to-noise ratio) obviously. Furthermore, the spectrum signal pre-treatment software and application software design is summarized. The self-made AOTF spectrometer can scan the pass-band of the spectrometer between 800nm and 1700nm with a bandwidth of 2nm at 800nm and 9nm at 1700nm by changing the radio-frequency (RF) driver frequency from 70 MHz to 20MHz. The experiment results show that the function of wave number vs scanning frequency has good linearity. The complete instrument used milk powder for sample, which found that the absorbing peak between measured spectrum and standard spectrum is coherent. The AOTF spectrometer is immune to orientation changes or even severe mechanical shock and vibrations, making it ideal for operation in harsh industrial environments. The actual application proves that it has high spectral resolution, high scanning speed and high signal output.

This paper adopts the Bluetooth wireless transmission to replace the conducting rings currently using in the active lap process to overcome the cost and abrasion problems brought by the conducting rings, which has great significance for reducing the costs of processing large aspheric mirrors. Based on the actual application requirements, Article proposes the overall program of using Bluetooth technology as data transmission, including the active lap-side and machine tool-side: In the machine tool-side, the MCU separately connects with Bluetooth module and the sensor via UART0 and UART1 serial port, and when the MCU receives the signals sending from the sensor, the MCU packs and then sends them through the Bluetooth module; while in the active lap side, the CCAL reads-out the position signals of sensor detecting in dual-port memory via one-side ports, and the other side ports connect with the MCU's high ports P4-P7, so the MCU can unpacks and stores the position signals receiving via Bluetooth module. This paper designs and implements the system's hardware circuit, and mainly introduces the ways of serial and parallel. Based upon the realized system, design the test program for the Bluetooth wireless transmission and the experiment results, in the condition of the active lap processing large aspheric mirrors, showed that Bluetooth technology can meet the requirements of practical applications.

Zerodur material is considered as the ideal material in the high performance optic systems because of its excellent thermal stability characteristics. This paper deals with the impacting factors on the zerodur material surface roughness during atmospheric pressure plasma jet(APPJ) processing. At first, based on multiphase and multi-component in zerodur material, the effect on the zerodur surface chemical components and surface roughness is studied when the element contained Si is etched during the chemical machining process. The change of surface microcosmic topography is observed, it is proved that the technology of atmospheric pressure plasma jet can modify the surface roughness of zerodur material. Moreover, in consideration of the re-deposition phenomenon in the machining process, the composition of the re-deposition are studied and the genesis of the re-deposition were analysed. Scanning Electron Microscopy (SEM) with Energy Dispersive X-ray spectrometry (EDX) were utilized to obtain the elemental composition of the sample powder residuum on zerodur surface. The relationship between substrate roughness and the process parameters is established based on the experimental results. Experimental results indicate that it is beneficial to add certain amount O₂ to modify the surface roughness of zerodur material. This finding provides an important basis for the improvement of surface roughness in APPJ of zerodur material.

This paper studies the effects of the antibacterial and anti-adhesion properties of self-assembled monolayers (SAMs) on optical parts. Therefore, the experiments in this study prepared several kinds of SAMs, including alkyl and biphenyl spacer chains with different surface terminal groups (-CH₃,-COOH) and head groups (-SH). This study reports the growth of eight self-assembled monolayers on optical parts: OTS, ODS, OTS with antibacterial solution, ODS with antibacterial solution, and pure antibacterial solution, with bio-compatibility. Experimental results regarding the contact angle of five self-assembled monolayers show that ODS with antibacterial illustrated the maximum contact angle 103° 12 hours after reaction. The solutions of OTS, ODS with antibacterial, OTS with antibacterial, and pure anti-bacterial showed contact angles of 102°, 99°, 101°, and 59° respectively. These results indicate that the antibacterial solution has negligible effects on anti-adhesion property of optical lenses. The results of digital optical microscope system analysis show that in the antibacterial experiment of eight kinds of selfassembled monolayers, the OTS_anti50% effect cultured for 24 hours achieved the best results, with a growth rate of 12%. The descending order of antibacterial effect is antibacterial 10%>ODS>OTS> antibacterial 50%>ODS_anti50%>OTS_anti10%>ODS_anti10%. In summary, the surface treatment of optical lenses involving OTS_anti 50% is the most capable of effectively increasing antifouling and antibacterial functions.

Integral Imaging (II) is a technique that is capable of creating and encoding a true volume spatial optical model of the object scene in the form of a planar intensity distribution through micro-lens array. With recent progress in the theory and micro-lens manufacturing, integral imaging is becoming a practical and prospective 3D display technology and attracting much attention. In this application, the generation of depth map and 3D scene reconstruction from the planar recorded integral image is essential if real and/or computer generated objects are to be integrated within integral 3D images. It is also essential to enable content-based image coding and content-based interactive manipulation to be carried out within integral images. In this technology, 3D scene information is existed in a great deal of "Element Image" under each micro-lens. A true volume spatial optical model of the 3D scene can be perceived through the corresponding micro-lens array replaying. Since micro-lens sheet is used in recording, only one recording is necessary in obtaining three-dimensional information. The precision of depth information will affect the integral images evidently. This paper presented a method of extracting more precise and reliable depth information with the interpolation algorithm based on the present depth extraction algorithm. Contrast experiment and data analysis prove that the 3D reconstruction result is more confirmable with our current depth information, the precision of 3D reconstruction is improved. This is very important to acquisition of the exact 3D scene information, analysis of the 3D spatial resolution and data processing of the next generation II-based 3DTV.

A method to test an off-axis parabolic (OAP) mirror at fine grinding stage using CMM (coordinate measuring machine) is introduced in this paper. Tilt error and the probe radius error have been removed as a system error before interpolation. An interpolation method, which based on Tikhonov regularization, is used to fit surface error. An example, which shows the effectiveness of this method, is also given.

In order to satisfy the requirements for the uniformity of infrared irradiance distribution and system energy efficiency, a freeform surface reflector is designed in this paper. First of all, the model of the infrared light source is established, basing on the shape of the actual light source and its radiation characteristics. Subsequently, a set of differential equations are presented according to the desired irradiance distribution on the optical stop. Afterwards, the surfaces data of the freeform reflector can be obtained by solve the equations using successive approximation method. Then the optical ray-tracing simulation is done by using the Monte Carlo approach. And the allowance of the infrared system is analyzed; the impacts that affect the simulation accuracy and the compensation process are also presented. The simulation results indicate that the distribution uniformity of infrared irradiance characteristics on the optical stop is higher than 95%, and the system energy efficiency reaches to 80%. Therefore, it can be concluded that the designed freeform surface reflector is an efficient approach to meet the demands of the uniform illumination of infrared light source and system energy efficiency.

Chemical mechanical polishing (CMP) technology in the semiconductor manufacturing process is expanded and used to machine lithium niobate (LiNbO3) wafer efficiently in order to obtain ultra smooth LiNbO3. The alkaline polishing slurry for LiNbO3 CMP is prepared in order to decreasing surface roughness and improving material removal rate. The paper optimized design four key parameters, polishing pressure, polishing plate speed, slurry flow rate and slurry pH which influence removal rate of LiNbO₃ were analyzed by using Taguchi method and the comprehensive optimized polishing parameter were obtained. The results of experiments indicate that when the polishing pressure is 140kPa, the polishing plate speed is 60r/min, the slurry flow rate is 180ml/min and the slurry pH is 11, the optimal polishing efficiency can be obtained. The removal rate of LiNbO3 wafer reaches 350nm/min.

CO₂ laser with 10.6μm wavelength radiate on damage with size below 80μm. Through examining with 351nm wavelength ultra-violet, it is found the larger damage size is, the lower extent of damage threshold is enhanced. During mitigation, thermal stress resulted from short interaction time and asymmetrical temperature distribution. Radial crack generates after damage and could expand if exposed to ultraviolet laser. After annealed in an oven for 9 hours, crack in the sample was eliminated.

A Shack-Hartmann WaveFront Sensor (SHWFS) with photoelectric detector which can be switched expediently between CCD and Intensified CCD (ICCD) is designed to get high detectivity or high sampling frequency according to the requirement. By switching the photoelectric detector, the Adaptive Optical System (AOS) can detect fainter stars with ICCD-based SHWFS when the atmosphere turbulence is changing slowly, and it can also work for bright stars with CCD-based SHWFS when the atmosphere turbulence is changing rapidly. The detectivities of CCD-based SHWFS and ICCD-based SHWFS are analyzed and compared in this paper according to the parameters of AOS for 1.8-meter telescope of the Yunnan Astronomical Observatory (YAO). The preliminary analysis result shows that the faintest stars which can be detected by ICCD-based SHWFS is about 3.2 magnitude dimmer than that can be detected by CCD-based SHWFS. The CCD-based SHWFS and the ICCD-base SHWFS can detect stars with magnitude of about 7 and 10 respectively.

This paper experimentally investigated the wear characteristics of diamond wheel in elliptical ultrasonic assisted grinding of monocrystal silicon. In this method, the monocrystal silicon workpiece attached on an elliptical ultrasonic vibrator vibrates ultrasonically in two directions: one is vertical to the work-surface; another is along the wheel axis. The vibrator is produced by bonding a piezoelectric ceramic (PZT) device on a metal elastic body and ultrasonically vibrates in 2D vibration mode when the PZT is excited by two alternating current voltages with a phase difference. Our previous experimental works showed that under the elliptical ultrasonic assistance the grinding forces are decreased by 30% and the surface roughness is improved by 20%. In this paper, in order to investigate the mechanism of wheel wear in EUAG, surface grinding experiments were carried out using a resin bond diamond wheel with a replaceable insert. The wheel surface and work-surface after grinding were observed directly by SEM. The obtained experiment results show that the main mechanism of wheel wear in EUAG is the micro-fracture and cleavage of the diamond grain, but that in CG is grit flattening and pullout. Moreover, the workpiece surface quality in EUAG is much better than that in CG. These indicate that the elliptical ultrasonic assisted grinding is an effective method for high efficiency and high quality grinding of monocrystal silicon.

Conventional LED optical design method that is commom for the point source approximation based on energy conservation and the law of refraction and reflection, and the final optical model solved by stepping method. The method that plays an important role in the LED second optical design is not applicable to the LED extended sources. In this paper, the optical design method is present for LED extended sources by using edge ray theorem, and light intensity optical model has be established by this method. The optical simulation results of uniform light intensity curve of the model are compared with the models designed by approximate design method of point source. The results show that the directions of outgoing light lines can be controlled more accurately by edge ray theorem and have better uniformity. The method can be applied for the LED encapsulation optical system design and multi-chip source optical design of high-power LED. It can improve the design accuracy and save design cost.

The efficiencies and uniformities of the backlight are mostly determined by the light guide plate which is an important component of the edge-lighting LED backlight. The optical properties of the LED for most of LGP (Light Guide Plate) design model had been neglected, and multi-layer optical films had been used. In this paper the trans-mission process of light-beam within edge-lighting LGP has been analysis with an intensity distribution model of multi-LED to derive the rule of netted dots arrangement. A formula of dots arrangement and the design method were obtained. Then the edge-ray theorem was used for micro-prism which is on top surface design. At last the optical simulation software was used for simulation and analysis, we compared with other design methods and the results show that this structure can easily eliminate the phenomenon that the brightness uniformity of the place near the source is not high, at the same time it can effectively reduce the number of prism film in maintaining the brightness of the LED backlight and Simplified the structure.

Using aspheric component in optical system can correct optical aberration, acquire high imaging quality, improve the optical characteristic, simplify system structure, and reduce system volume. Nowadays, high-precision surface grinding machine is an important approach to processing optical aspheric elements. However, because of the characteristics of optical aspheric elements, the processing method makes a higher demand to whole performance of surface grinding machine, and hardly to achieve ideal machining effect. Taking high generality and efficiency into account, this paper presents a compensation method for machining errors of high-precision surface grinding machine, which bases on optical aspheric elements, to achieve high-precision machining for all kinds of optical aspheric elements. After compensation, the machining accuracy of grinding machine could reach 2um/200×200mm. The research bases on NC surface grinding machine which is self developed. First of all, this paper introduces machining principle for optical aspheric elements on the grinding machine. And then error sources which producing errors are analyzed. By contacting and non-contacting measurement sensors, measurement software which is self designed realizes on-position measure for grinded workpiece, then fits surface precision and machining errors. Through compensation software for machining error which is self designed, compensation algorithm is designed and translated compensation data into G-code for the high-precision grinding machine to achieve compensation machining. Finally, by comparison between machining error compensation before and after processing, the experiments for this purpose are done to validate the compensation machining accuracy.

The compensation method for the error of diamond tool's cutting edge is a bottle-neck technology to hinder the high accuracy aspheric surface's directly formation after single diamond turning. Traditional compensation was done according to the measurement result from profile meter, which took long measurement time and caused low processing efficiency. A new compensation method was firstly put forward in the article, in which the correction of the error of diamond tool's cutting edge was done according to measurement result from digital interferometer. First, detailed theoretical calculation related with compensation method was deduced. Then, the effect after compensation was simulated by computer. Finally, φ50 mm work piece finished its diamond turning and new correction turning under Nanotech 250. Testing surface achieved high shape accuracy pv 0.137λ and rms=0.011λ, which approved the new compensation method agreed with predictive analysis, high accuracy and fast speed of error convergence.

Titanium nitride film was grown on the substrates of silicon by magnetron sputtering. The effect on structure and performance of the TiN film at different sputtering pressure during sputtering process were studied. The result shows that the main component of the film is cubic phase Titanium nitride when changed the pressure of chamber on the condition that the other parameters keep unchanged. All of thin film crystallization display (200) crystal surface preferred orientation obviously and translate to (111) crystal surface gradually with increase of film thickness. Film thickness became thin with the increasing of the pressure. The results of the test demonstrate that the resulted films , in which no large size crystalline defect was found, was very dense , uniform and good appearance. The pressure was found to be 0.35pa, at which high quality film were grown with smoothest surface, highest degree of crystallinity and best average reflectance. It was proved that the film accurately meet the quality requirements of optical thin film.

Low temperature glass molding technology is the main method on volume-producing high precision middle and small diameter optical cells in the future. While the accuracy of the molding die will effect the cell precision, so the high precision molding die development is one of the most important part of the low temperature glass molding technology. The molding die is manufactured from high rigid and crisp metal alloy, with the ultrasonic vibration character of high vibration frequency and concentrative energy distribution; abrasive particles will impact the rigid metal alloy surface with very high speed that will remove the material from the work piece. Ultrasonic can make the rigid metal alloy molding die controllable polishing and reduce the roughness and surface error. Different from other ultrasonic fabrication method, untouched ultrasonic polishing is applied on polish the molding die, that means the tool does not touch the work piece in the process of polishing. The abrasive particles vibrate around the balance position with high speed and frequency under the drive of ultrasonic vibration in the liquid medium and impact the workspace surface, the energy of abrasive particles come from ultrasonic vibration, while not from the direct hammer blow of the tool. So a nummular vibrator simple harmonic vibrates on an infinity plane surface is considered as a model of ultrasonic polishing working condition. According to Huygens theory the sound field distribution on a plane surface is analyzed and calculated, the tool removing function is also deduced from this distribution. Then the simple point ultrasonic polishing experiment is proceeded to certificate the theory validity.

The determination of the nucleation region for Si nanoparticles synthesized by pulsed laser ablation was helpful to find proper parameter to obtain the high quality nanocrystalline silicon (nc-Si) thin films. A XeCl excimer laser was used to ablate high-resistively single crystalline Si target under a deposition pressure of 10 Pa. Glass or single crystalline (111) Si substrates, in parallel with the axial direction of silicon target, were located at a distance of 2.0 cm under the plasma to collect a series of nc-Si thin films. The Raman spectra, X-ray diffraction spectra (XRD) and Scanning electron microscopy (SEM) images show that Si nanoparticles deposited in substrates were only formed in the range 0.3~3.0cm away from the target. In this area, the size of the nanoparticles increased firstly and then reduced, meanwhile, the distributions for the size of the nanoparticles were also changed. According to the character of the beginning and the terminus of "nucleation area", combining with the "Horizontal Projectile Motion", the range and position of "nucleation area" were determination.

IAD-Si surface coating technique can availably improve surface quality of SSiC mirrors. But thermal stability of the film has great influence on optical and mechanical performances of the coated mirror. Under the action of space environment, primary damage forms of a coated mirror are destructed coating and changed surface figure. So, thermal shock stability of IAD-Si coated SSiC mirrors was tested and analyzed in this paper. Firstly, surface patterns of IAD-Si films on SSiC samples were observed with MF-A-1010B electronic microscope before and after thermal shock (77K~473K), results showed that there was no crack or abscission phenomena. Then, the surface figure stability of a 400mm, IAD-Si coated mirror was tested. After received 223K~473K thermal impact, surface figure changed less than λ/100 RMS (λ=632.8nm).

Based on a large number of technology experiments, five parameters which play key roles in keeping the quality and effects of laser cladding were extracted from a large number of laser re-manufacturing processing parameters. Each processing parameter was researched respectively through theoretical analysis and experimental verification. Selection principles of processing parameters for laser re-manufacturing were recommended. The above works provided the theoretical and experimental bases for the application of laser re-manufacturing technology.

The cladding technical types and choosing principle during laser re-manufacturing such as beam pattern, surface pretreatment, cladding process, post-processing technology etc., were introduced. The powder feeding method and preheat treatment were researched. The above works provide the bases for technical design of the laser remanufacturing technology.

In order to develop low loss, high-performance 193nm Fluoride HR mirrors and anti-reflection coatings, LaF₃ and AlF₃ materials, used for a single-layer coating, were deposited by a molybdenum boat evaporation process. Various microstructures that formed under different substrate temperatures and with deposition rates were investigated. The relation between these microstructures (including cross section morphology, surface roughness and crystalline structure), the optical properties (including refractive index and optical loss) and mechanical properties (stress) were investigated. Furthermore, AlF₃ used as a low-index material and LaF₃ used as a high-index material were designed and deposited for multilayer coatings. Transmittance, reflectance, stress, and the laser-induced damage threshold (LIDT) were studied. It is shown that AlF₃ and LaF₃ thin films, deposited on the substrate at a temperature of 300 °C, obtained good quality thin films with high transmittance and little optical loss at 193 nm. For multilayer coatings, the absorption mainly comes from LaF₃. Based on these studies, The thickness of 193nm films was controled by a 1/3 baffle with pre-coating technology. the LaF₃/AlF₃ AR coantings and HR mirrors at 193nm were designed and deposited. Under the present experimental conditions, the reflectance of LaF₃/AlF₃ HR mirror is up to 96%, and its transmittance is 1.5%. the LaF₃/AlF₃ AR coanting's residual reflectance is less than 0.14%, and single-sided transmittance is 93.85%. To get a high-performance 193nm AR coating, super-polished substrate is the best choice.

Viscosity of glass is one of its important technological properties. It is usually adopted as a mark in controlling and evaluating the workability of glass. The viscous features in a glass forming process are strongly relevant to the temperature distribution. Appropriate procedure setting and controlling of temperature is an essential issue for precision glass molding. But the characteristic viscosity of glass is difficult to be observed directly in a practical lens molding. It's not convenient to set up the molding conditions caused by the differences between theoretical data and actual system. The purpose of this experimental study is intended to provide a simple and reliable method for determination of suitable temperature intervals of glasses used in the precision molding fabrication which meets the requirements of process tolerances in the industrial productions. The average glass deforming force and center thickness of molded lens are taken as the two conditions of determination principle for molding temperature ranges. The average force should not less than the minimum value of measurement accuracy and the lens thickness should reach the design target in these temperature ranges. These two conditions are easy to be measured and fit for application in the engineering. The molding temperature ranges of several kinds of glass were obtained in this project. One of them is Schott optical glass P-LASF51 which is selected for evaluating and validating this method. Its suitable molding temperature range is from 590 to 614 . The results of molding experiments demonstrate the method is effective and feasible.

Precision glass compression molding is an attractive approach to manufacture small precision optics in large volume over traditional manufacturing techniques because of its advantages such as lower cost, faster time to market and being environment friendly. In order to study the relationship between the surface figures of molded lenses and molding process parameters such as temperature, pressure, heating rate, cooling rate and so on, we present some glass compression molding experiments using same low Tg (transition temperature) glass material to produce two different kinds of aspheric lenses by different molding process parameters. Based on results from the experiments, we know the major factors influencing surface figure of molded lenses and the changing range of these parameters. From the knowledge we could easily catch proper molding parameters which are suitable for aspheric lenses with diameter from 10mm to 30mm.

The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Φ300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.