Influence of ion beam bombardment on surface roughness of K9 glass substrate

Yongqiang Pan; Guojun Huang; Lingxia Hang

doi:10.1117/12.866134

6 October 2010 Influence of ion beam bombardment on surface roughness of K9 glass substrate

Yongqiang Pan, Guojun Huang, Lingxia Hang

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76551G (2010) https://doi.org/10.1117/12.866134
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Ion beam bombardment optical substrate surface has become an important part of process of optical thin films deposition. In this work, the K9 optical glass is bombarded by the broad beam cold cathode ion source. The dependence of the K9 glass surface roughness on the ion beam bombardment time, the ion energy, the distance and incident angle are all investigated, respectively. Surface roughness of K9 glass is measured using Talysurf CCI. The experimental results show that when the ion energy is 800ev, the bombardment distance of 20cm, with the ion beam bombardment time increased, the K9 substrate surface roughness first increase and then decrease. When the ion beam bombardment distance is 20cm, bombardment time is 10min, with the bombardment energy increases, substrate surface roughness increase first and then decrease, especially in the ion energy greater than 1200ev, the optical substrate surface roughness rapidly increases. When the ion energy is 800 eV, bombardment time is 10min, with the bombardment distance increase, substrate surface roughness decrease gradually. Furthermore, the incident angle of ion beam plays an important role in improving the K9 glass surface roughness.

Citation Download Citation

Yongqiang Pan, Guojun Huang, and Lingxia Hang "Influence of ion beam bombardment on surface roughness of K9 glass substrate", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76551G (6 October 2010); https://doi.org/10.1117/12.866134

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