Research of combination polishing technology

Liangxia Hang; Xueliang Zhu; Weiguo Liu; Zhongda Guo; Zhili Chen; Hongjun Wang

doi:10.1117/12.866698

6 October 2010 Research of combination polishing technology

Liangxia Hang, Xueliang Zhu, Weiguo Liu, Zhongda Guo, Zhili Chen, Hongjun Wang

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76552R (2010) https://doi.org/10.1117/12.866698
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Optical nano-surface is mainly processed by single method, which's high efficiency and high definition are in opposition to each other. The fused silica surface is manufactured with the combination of the Magnetorhelogical manufacturing technology and the Ballonet polishing technology. Finally the high-quality optical nano-surface is achieved which RMS of roughness value is 0.8nm and the sub-surface damage is less.

Citation Download Citation

Liangxia Hang, Xueliang Zhu, Weiguo Liu, Zhongda Guo, Zhili Chen, and Hongjun Wang "Research of combination polishing technology", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552R (6 October 2010); https://doi.org/10.1117/12.866698

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