Identification and quantification of non-commonpath error in lateral shearing interferometry

Bingcai Liu; Ailing Tian; Hongjun Wang; Chunhui Wang

doi:10.1117/12.865729

11 October 2010 Identification and quantification of non-commonpath error in lateral shearing interferometry

Bingcai Liu, Ailing Tian, Hongjun Wang, Chunhui Wang

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76560H (2010) https://doi.org/10.1117/12.865729
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The lateral shearing interferometry based on four step phase shifting has been widely used for aspherical surface measurement, but the non-commonpath error is the main factor that directly affects the measurement results. Based on the structure of lateral shearing aspherical surface interferometer with phase shifting, the non-commonpath components, such as the beam splitter cubes, shearing plate and two right angle prisms, are adopted to produce the displacement of wave-front of under test aspherical surface, because of these components with manufacture errors, the under test wavefront will become deformation when it goes through them, and these wave-front deformations will be performed in the shearing interferograms, therefore, the measurement results obtained by the shearing interferograms compromise the non-commonpath error. In this paper, through analyzing four step phase shifting interferograms with a shearing value and four step phase shifting interferograms with no displacement, the identification and quantification methods of noncommonpath error were put forward, then, the non-commonpath error can be subtracted to correct the measurement results, finally, the simulation and experiment results demonstrate the feasibility of this approach to improve measurement accuracy.

Citation Download Citation

Bingcai Liu, Ailing Tian, Hongjun Wang, and Chunhui Wang "Identification and quantification of non-commonpath error in lateral shearing interferometry", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560H (11 October 2010); https://doi.org/10.1117/12.865729

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