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11 October 2010 Identification and quantification of non-commonpath error in lateral shearing interferometry
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Abstract
The lateral shearing interferometry based on four step phase shifting has been widely used for aspherical surface measurement, but the non-commonpath error is the main factor that directly affects the measurement results. Based on the structure of lateral shearing aspherical surface interferometer with phase shifting, the non-commonpath components, such as the beam splitter cubes, shearing plate and two right angle prisms, are adopted to produce the displacement of wave-front of under test aspherical surface, because of these components with manufacture errors, the under test wavefront will become deformation when it goes through them, and these wave-front deformations will be performed in the shearing interferograms, therefore, the measurement results obtained by the shearing interferograms compromise the non-commonpath error. In this paper, through analyzing four step phase shifting interferograms with a shearing value and four step phase shifting interferograms with no displacement, the identification and quantification methods of noncommonpath error were put forward, then, the non-commonpath error can be subtracted to correct the measurement results, finally, the simulation and experiment results demonstrate the feasibility of this approach to improve measurement accuracy.
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Bingcai Liu, Ailing Tian, Hongjun Wang, and Chunhui Wang "Identification and quantification of non-commonpath error in lateral shearing interferometry", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560H (11 October 2010); https://doi.org/10.1117/12.865729
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