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11 October 2010Identification and quantification of non-commonpath error in lateral shearing interferometry
The lateral shearing interferometry based on four step phase shifting has been widely used for aspherical surface
measurement, but the non-commonpath error is the main factor that directly affects the measurement results. Based on
the structure of lateral shearing aspherical surface interferometer with phase shifting, the non-commonpath components,
such as the beam splitter cubes, shearing plate and two right angle prisms, are adopted to produce the displacement of
wave-front of under test aspherical surface, because of these components with manufacture errors, the under test wavefront
will become deformation when it goes through them, and these wave-front deformations will be performed in the
shearing interferograms, therefore, the measurement results obtained by the shearing interferograms compromise the
non-commonpath error. In this paper, through analyzing four step phase shifting interferograms with a shearing value
and four step phase shifting interferograms with no displacement, the identification and quantification methods of noncommonpath
error were put forward, then, the non-commonpath error can be subtracted to correct the measurement
results, finally, the simulation and experiment results demonstrate the feasibility of this approach to improve
measurement accuracy.
Bingcai Liu,Ailing Tian,Hongjun Wang, andChunhui Wang
"Identification and quantification of non-commonpath error in lateral shearing interferometry", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560H (11 October 2010); https://doi.org/10.1117/12.865729
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Bingcai Liu, Ailing Tian, Hongjun Wang, Chunhui Wang, "Identification and quantification of non-commonpath error in lateral shearing interferometry," Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560H (11 October 2010); https://doi.org/10.1117/12.865729