Error analysis and system optimization of non-null aspheric testing system

Yongjie Luo; Yongying Yang; Dong Liu; Chao Tian; Yongmo Zhuo

doi:10.1117/12.867070

11 October 2010 Error analysis and system optimization of non-null aspheric testing system

Yongjie Luo, Yongying Yang, Dong Liu, Chao Tian, Yongmo Zhuo

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76560N (2010) https://doi.org/10.1117/12.867070
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A non-null aspheric testing system, which employs partial null lens (PNL for short) and reverse iterative optimization reconstruction (ROR for short) technique, is proposed in this paper. Based on system modeling in ray tracing software, the parameter of each optical element is optimized and this makes system modeling more precise. Systematic error of non-null aspheric testing system is analyzed and can be categorized into two types, the error due to surface parameters of PNL in the system modeling and the rest from non-null interferometer by the approach of error storage subtraction. Experimental results show that, after systematic error is removed from testing result of non-null aspheric testing system, the aspheric surface is precisely reconstructed by ROR technique and the consideration of systematic error greatly increase the test accuracy of non-null aspheric testing system.

Citation Download Citation

Yongjie Luo, Yongying Yang, Dong Liu, Chao Tian, and Yongmo Zhuo "Error analysis and system optimization of non-null aspheric testing system", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560N (11 October 2010); https://doi.org/10.1117/12.867070

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