Error analysis of spherical ultra-precision measurement

Dongsheng Wang; Kaiwei Wang; Yibing Shen; Jianhua Peng

doi:10.1117/12.866662

11 October 2010 Error analysis of spherical ultra-precision measurement

Dongsheng Wang, Kaiwei Wang, Yibing Shen, Jianhua Peng

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76560O (2010) https://doi.org/10.1117/12.866662
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Absolute interferometric testing of spherical surfaces is one of effective methods for ultra-precision testing, which can eliminate the systematic errors. In this paper, we discuss the absolute measurement of spherical surfaces and analyze the influence of errors existed in the organism comprehensively. To improve the testing precision, it is necessary to remove the alignment errors such as tilt and defocus. The traditional methods remove alignment errors by low-level approximation, so they may be not effective for the small F-number surface. To solve this problem, we propose a novel measurement with high-order approximation model. The simulation and experiment results show that: while the error between high-order approximation model and low-level approximate model is small on tilt, it is large on defocus, and the error will become larger when the F-number of testing surface becomes smaller; alignment errors can be well adjusted by our high-order approximation model.

Citation Download Citation

Dongsheng Wang, Kaiwei Wang, Yibing Shen, and Jianhua Peng "Error analysis of spherical ultra-precision measurement", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560O (11 October 2010); https://doi.org/10.1117/12.866662

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