Comparison of optical surface roughness measured by stylus profiler, AFM, and white light interferometer using power spectral density

Jianchao Chen; Tao Sun; Jinghe Wang

doi:10.1117/12.863268

11 October 2010 Comparison of optical surface roughness measured by stylus profiler, AFM, and white light interferometer using power spectral density

Jianchao Chen, Tao Sun, Jinghe Wang

Author Affiliations +

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76562D (2010) https://doi.org/10.1117/12.863268
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Surface roughness measurements were performed on fused-silica, silicon wafer, and glass-ceramic (Zerodur) by mechanical stylus profiler, atomic force microscope (AFM), and white light interferometer (WLI). Because of the differences of spatial frequency bandwidth of the measurement instruments surface roughnesses are actually not directly comparable. In this study, a novel method has been developed to directly compare the roughnesses measured with different instruments using power spectral density (PSD) function which can be calculated from the measurement data. The RMS roughnesses were obtained by integrating areas in the overlapping regions of two or more instruments so that roughnesses measured with different instruments could be directly compared. The agreement among RMS roughnesses measured with the different techniques improved considerably, and the remaining differences could be explained as being caused by surface features to which the instruments responded differently. This fruitful work also provides a great guidance for the selection of surface roughness measurement instruments.

Citation Download Citation

Jianchao Chen, Tao Sun, and Jinghe Wang "Comparison of optical surface roughness measured by stylus profiler, AFM, and white light interferometer using power spectral density", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76562D (11 October 2010); https://doi.org/10.1117/12.863268

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