Waveguide ring coupling design of MOG

Xiang Ji; Zi-li Li; Yuan-you Chen; Xiao-hu Qin; Xin Lv

doi:10.1117/12.866430

22 October 2010 Waveguide ring coupling design of MOG

Xiang Ji, Zi-li Li, Yuan-you Chen, Xiao-hu Qin, Xin Lv

Proceedings Volume 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 76571P (2010) https://doi.org/10.1117/12.866430
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The key technology of micro optic gyroscopes (MOGs) is to fabricate low-loss waveguide and use coupling technology to form reciprocal structure. The main topic in this paper is to study the coupling structure of MOG's spiral-ring waveguide. Using for the reference of fiber's low-loss character, the fiber-preform project is chosen as optimization means. According to the singlemode conditions, the width and thickness of rectangle waveguide can be calculated. The bend loss waveguide can decrease by means of introducing an offset at the junction of two waveguides and etching groove at the outside of bend waveguide. In this article intersection waveguide is designed to reduce the difficulty of coupling processing. Light in-and-out port coupled at opposite side is choosen for machining easiness in experiment.What's more, the edge-coupling technology being put forward to keep light transmit along the same rotary direction. An efficient means is introduced, which uses angle 45°to reflect the light to couple two waveguide at inside-end or outside-end, and outside-end coupling is chosen for processing convenience in the design. In experiment, the waveguide be fabricated by thick photoresist AZ4620, etched by RIE, When the angle of wafer and ion is set 85°, the angle of one sidewall can be etched almost 45°. It's benefit to design the coupling structure of MOG's spiral-ring waveguide.

Citation Download Citation

Xiang Ji, Zi-li Li, Yuan-you Chen, Xiao-hu Qin, and Xin Lv "Waveguide ring coupling design of MOG", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76571P (22 October 2010); https://doi.org/10.1117/12.866430

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KEYWORDS

Waveguides

Etching

Semiconducting wafers

Fiber characterization

Refractive index

Ions

Photoresist materials

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