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22 October 2010Calculation of intrinsic surface acoustic wave velocity in LiNbO3
Lithium Niobate (LN) crystal has excellent piezoelectric properties, it can be used as substrates of surface acoustic wave
(SAW) devices, for example delay line, filter, oscillator, convolver and so on. Intrinsic SAW velocity is determined by
the internal property of crystals. In this paper, SAW acoustic basic equation group and SAW mechanical boundary
condition equation group are deduced. Intrinsic SAW velocities are calculated systematically using a circle iterative
method in zx, xy and yz three coordinate planes of LN along different directions. Stiffness coefficient of piezoelectric
crystal can be changed by piezoelectric effect and it is named as piezoelectric modified stiffness coefficient. Reciprocal
velocity Curves of LN in the three coordinate planes using the non-modified stiffness coefficients and the modified
stiffness coefficients are drawn. Many characters of the SAW device are related to the acoustic velocities, so research
results lay a solid base for design and manufacture of the SAW device. It has theoretical significance and practical value.
Tao Liu andKuanxin Yu
"Calculation of intrinsic surface acoustic wave velocity in LiNbO3", Proc. SPIE 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, 765826 (22 October 2010); https://doi.org/10.1117/12.866328
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Tao Liu, Kuanxin Yu, "Calculation of intrinsic surface acoustic wave velocity in LiNbO3," Proc. SPIE 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, 765826 (22 October 2010); https://doi.org/10.1117/12.866328