Calculation of intrinsic surface acoustic wave velocity in LiNbO3

Tao Liu; Kuanxin Yu

doi:10.1117/12.866328

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22 October 2010 Calculation of intrinsic surface acoustic wave velocity in LiNbO₃

Tao Liu, Kuanxin Yu

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Proceedings Volume 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology; 765826 (2010) https://doi.org/10.1117/12.866328
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Lithium Niobate (LN) crystal has excellent piezoelectric properties, it can be used as substrates of surface acoustic wave (SAW) devices, for example delay line, filter, oscillator, convolver and so on. Intrinsic SAW velocity is determined by the internal property of crystals. In this paper, SAW acoustic basic equation group and SAW mechanical boundary condition equation group are deduced. Intrinsic SAW velocities are calculated systematically using a circle iterative method in zx, xy and yz three coordinate planes of LN along different directions. Stiffness coefficient of piezoelectric crystal can be changed by piezoelectric effect and it is named as piezoelectric modified stiffness coefficient. Reciprocal velocity Curves of LN in the three coordinate planes using the non-modified stiffness coefficients and the modified stiffness coefficients are drawn. Many characters of the SAW device are related to the acoustic velocities, so research results lay a solid base for design and manufacture of the SAW device. It has theoretical significance and practical value.

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Tao Liu and Kuanxin Yu "Calculation of intrinsic surface acoustic wave velocity in LiNbO₃", Proc. SPIE 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, 765826 (22 October 2010); https://doi.org/10.1117/12.866328

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