Paper
3 May 2010 Optical coatings for deep concave surfaces
Author Affiliations +
Abstract
A method of antireflection coating the interior and exterior surfaces of a deep concave optic is under development and is described. The challenges of coating such an optic include obtaining uniform performance, good mechanical and optical performance across a temperature range of ambient to 1000oC, and the transition to cost effective production. The coating process utilizes a tuned cylindrical magnetron sputtering source which sits inside the nose cone to coat the inner surface and a complementary cylindrical sputtering source to coat the outside surface. The flux from the sputtering source is tuned along the length of the cylinder by stacking an inner core of magnets in such a way as to produce a spatially variant magnetic field which allows the source distribution to approximate a uniform deposition on the surface of the optic. A deposition occulting mask provides fine tuning of source uniformity.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas D. Rahmlow Jr., Jeanne E. Lazo-Wasem, Mark B. Moran, and Linda F. Johnson "Optical coatings for deep concave surfaces", Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 766026 (3 May 2010); https://doi.org/10.1117/12.850313
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Coating

Plasma

Glasses

Sputter deposition

Argon

Magnetism

Oxygen

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